From lian at Stanford.EDU Sat Sep 9 13:56:52 2000 From: lian at Stanford.EDU (Lian Zhang) Date: Sat, 9 Sep 2000 13:56:52 -0700 (PDT) Subject: nitride run time Message-ID: <200009092056.NAA21899@epic11.Stanford.EDU> Hi, I remember we could check log files in crystal system to decide how long we need to run the recipe. Seems it's no longer available. How do you decide the run time now? I need to grow 1um low stress nitride (LONH378), any ideas how long I need to run? Thanks, Lian