nitride run time

Lian Zhang lian at Stanford.EDU
Sat Sep 9 13:56:52 PDT 2000


I remember we could check log files in crystal system to decide how long
we need to run the recipe.  Seems it's no longer available.  How do you
decide the run time now?  I need to grow 1um low stress nitride (LONH378),
any ideas how long I need to run?


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