From mbadi at piezo.Stanford.EDU  Wed Apr 11 08:43:07 2001
From: mbadi at piezo.Stanford.EDU (Mohammed H. Badi)
Date: Wed, 11 Apr 2001 08:43:07 -0700 (PDT)
Subject: Deposition Info
Message-ID: <Pine.GSO.4.31.0104110839520.8987-100000@megarayl.Stanford.EDU>

Hey all,
   I did a thick nitride deposition last night.  Turns out I way overshot
my target; either the deposition rate has increased recently OR the dep
rate is generally faster for thicker films.

Thanks.

moe.


	Nitride Depositon 4/10/01
	Furnace: TylanNitride #10
	Program: LONH378 (2 hours + variable)
	Variable: 289.86 mins = 04:49:51
	Expected Rate: 34.5 A/min
	Expected Thickness: 10,000 A
	Measured RI: 2.5
	Measured Rate: 37.78 A/min
	Measured Thickness: 10950 A
	Standard Deviation (Thickness): 85.97 A



   Uniformity:

              Wafer Schematic


                ###########
              ##            ##
             ##              ##
            ##  1    2    3   #
            #                  #
            #   4    5    6    #
            ##                 #
            ##  7    8    9   #
             ##              ##
              ##            ##
                ###########
		  (Flat)

            Loc1  Loc2  Loc3  Loc4  Loc5  Loc6  Loc7  Loc8  Loc9
            ----  ----  ----  ----  ----  ----  ----  ----  ----
	    10933 10906	10987 10936 10760 11040 11007 10909 11030





From sanli at piezo.Stanford.EDU  Thu Apr 12 12:26:55 2001
From: sanli at piezo.Stanford.EDU (Sanli Ergun)
Date: Thu, 12 Apr 2001 12:26:55 -0700 (PDT)
Subject: problem
Message-ID: <Pine.GSO.4.31.0104121224170.15219-100000@piezo.Stanford.EDU>


Hi,
My process is finished, but the tube does not come out. I cannot pull it
manually neither. I'm waiting for Ray to return from lunch at 13:00. I'll
be there to unload my wafers. However, this may delay the nitride runs
today. I wanted to let you know.

________________________________________________________
Arif Sanli Ergun
Engineering Research Associate
E. L. Ginzton Laboratory,
Room : 130,
Stanford University,
Stanford, CA, 94305-4085
Phone: (650) 723-8447
Fax  : (650) 725-7509
www  : http://piezo.stanford.edu/group/IRP/sanliIRP.html



From dlaser at Stanford.EDU  Thu Apr 12 14:04:42 2001
From: dlaser at Stanford.EDU (Daniel James Laser)
Date: Thu, 12 Apr 2001 14:04:42 -0700 (PDT)
Subject: Tylannitride available
Message-ID: <200104122104.f3CL4gj25650@myth2.Stanford.EDU>

With the tube having been down earlier, I'm not going to be able to fit my 
run in.  So the nitride tube is available until 9pm.  

Dan Laser


Forwarded message:
> From seymour at snf.stanford.edu Thu Apr 12 13:51:35 2001
> Delivered-To: dlaser at snf.stanford.edu
> Message-ID: <3AD6154F.9DE944AA at snf.stanford.edu>
> Date: Thu, 12 Apr 2001 13:51:27 -0700
> From: Ray Seymour <seymour at snf.stanford.edu>
> X-Mailer: Mozilla 4.7 [en]C-NSCPCD  (WinNT; I)
> X-Accept-Language: en
> MIME-Version: 1.0
> To: dlaser at snf.stanford.edu
> Subject: Tylannitride
> Content-Type: text/plain; charset=us-ascii
> Content-Transfer-Encoding: 7bit
> X-UIDL: 13c3fa63fee317f71143668dd892f5ed
> 
> The tube opening problem has been fixed and the system is ready to run
> 
> 



From mayur at stanford.edu  Wed Apr 18 01:44:13 2001
From: mayur at stanford.edu (Mayur Joshi)
Date: Wed, 18 Apr 2001 01:44:13 -0700 (PDT)
Subject: Reservation Cancelled today
Message-ID: <Pine.LNX.4.10.10104180142460.7017-100000@gobears.stanford.edu>

Hi,

I am canceling my reservation today.  I hope this has not caused any
inconvenience.

Mayur




From dlaser at Stanford.EDU  Thu Apr 26 09:08:47 2001
From: dlaser at Stanford.EDU (Daniel James Laser)
Date: Thu, 26 Apr 2001 09:08:47 -0700 (PDT)
Subject: canc res nitride tube Thurs 11am-6pm
Message-ID: <200104261608.f3QG8lK19286@cardinal0.Stanford.EDU>

sorry for the late notice.  --Dan