From rcrane at snf.stanford.edu  Mon Aug  6 17:29:41 2001
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Mon, 06 Aug 2001 17:29:41 -0700
Subject: Toxic gas tests complete
Message-ID: <3B6F3675.B7C5D461@snf.stanford.edu>

The toxic gas alarm system tests are now complete. All tools using toxic
gases are back up with the following exceptions:
tylanpoly
tylanbpsg
tylanSiGe
tystar 1
EPI

Silane MFC calibrations are still being completed. Tools should be up
tomorrow.

Thanks,

Dick


From latta at snf.stanford.edu  Thu Aug  9 14:59:53 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Thu, 09 Aug 2001 14:59:53 -0700
Subject: LONH378 test results
Message-ID: <3B7307D9.4E9A9A25@snf.stanford.edu>

Folks,

As you might know, we ran a LONH378 program yesterday to test out the
system.  Here are the results;

	Dep Time	00:60:00
	Dep Thickness	Front  ~1890A	Back  ~1990
	Refractive Index	2.28	       2.32
	Stress		Tensile 75-85MPa

Thanks to Uli and Phil for their help!


From mbartsch at Stanford.EDU  Thu Aug  9 16:29:33 2001
From: mbartsch at Stanford.EDU (Michael S. Bartsch)
Date: Thu, 9 Aug 2001 16:29:33 -0700 (PDT)
Subject: tube free 6pm-midnight
Message-ID: <200108092329.f79NTXd07306@myth5.Stanford.EDU>



From seymour at snf.stanford.edu  Wed Aug 15 16:01:44 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Wed, 15 Aug 2001 16:01:44 -0700
Subject: tube status
Message-ID: <3B7AFF58.C4AF4285@snf.stanford.edu>

The nitride tube is up. The test in progress, made it through step 40
where it was failing




From mbartsch at Stanford.EDU  Thu Aug 16 04:45:55 2001
From: mbartsch at Stanford.EDU (Michael S. Bartsch)
Date: Thu, 16 Aug 2001 04:45:55 -0700 (PDT)
Subject: Res Removed 7pm-2am
Message-ID: <200108161145.f7GBjtK22025@myth5.Stanford.EDU>



From jhemanth at stanford.edu  Mon Aug 20 11:10:29 2001
From: jhemanth at stanford.edu (Hemanth Jagannathan)
Date: Mon, 20 Aug 2001 11:10:29 -0700 (PDT)
Subject: Reservation Cancelled Tylan Nitride free till 10pm
Message-ID: <Pine.GSO.4.31.0108201109320.20591-100000@elaine20.Stanford.EDU>



---------------------------------------------------------------------------------------------------------



From sjlee at snf.stanford.edu  Mon Aug 20 11:27:24 2001
From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu)
Date: Mon, 20 Aug 2001 11:27:24 -0700
Subject: Reservation Cancelled Tylan Nitride free till 10pm
References: <Pine.GSO.4.31.0108201109320.20591-100000@elaine20.Stanford.EDU>
Message-ID: <OE67R6mJB526tr5XsCj000015ed@hotmail.com>

Thanks!  I just reserved most of this afternoon, and consequently
released the reservation after 10PM.  Still several hours available this
evening in case others are interested.

-John


----- Original Message -----
From: "Hemanth Jagannathan" <jhemanth at stanford.edu>
To: <tylannitride at snf.stanford.edu>
Sent: Monday, August 20, 2001 11:10 AM
Subject: Reservation Cancelled Tylan Nitride free till 10pm




------------------------------------------------------------------------
---------------------------------




From sjlee at snf.stanford.edu  Tue Aug 21 08:10:28 2001
From: sjlee at snf.stanford.edu (John Lee)
Date: Tue, 21 Aug 2001 08:10:28 -0700
Subject: LONH378
Message-ID: <3B8279E4.18B11E08@snf.stanford.edu>

Hi,

One of the tylannitride users offered to investigate problems with
refactive index, in particular for films deposited using LONH378. 
Sorry, I accidentally erased the original message.  Unfortunately I
can't offer any examination wafers because all of them are already far
into downstream processing.  My labmate (swcha) did however observe some
unusually high thickness reported on Nanospec.  We expected 600-700 A,
but Nanospec said it was ~800.

Thanks,
-John


From gladys at snf.stanford.edu  Tue Aug 21 18:29:55 2001
From: gladys at snf.stanford.edu (Gladys Sarmiento)
Date: Tue, 21 Aug 2001 18:29:55 -0700
Subject: tylannitride dep log
Message-ID: <3B830B13.33B1148E@snf.stanford.edu>


To ALL tylannitride users:
Please update the dep log after your runs.

Thanks,
Gladys



From mbadi at relgyro.stanford.edu  Tue Aug 21 19:54:57 2001
From: mbadi at relgyro.stanford.edu (Mohammed H. Badi)
Date: Tue, 21 Aug 2001 19:54:57 -0700 (PDT)
Subject: LONH378 Run Data
Message-ID: <Pine.SOL.3.95.1010821195229.20629C-100000@relgyro.stanford.edu>

Hey all,
  I did a characterization run of the nitride tube tonight.  My data is
below.  The upshot is that the tube seems to be working well.

moe.
mbadi at snf

--------
Mohammed H. Badi			Bounce.
650-906-0663




	Nitride Deposition 8.21.01 @ 1600
	Purpose: To test film quality
	Furnace: TylanNitride #10
	Program: LONH378 (2 hours + variable time) 
	Variable Time: 01:12:00
	Wafers: 4 C-Test Wafers
	Expectd Rate: 34.68 A/min	
	Expected Thickness: 2500 A
	Expected RI: 2.37
	Measured Rate: 31.94 A/min
	Measured Thickness: 2300 A
	Measured RI: 2.311
	Note: I used Gaertner to measure the RI.  Only one of my four wafers
		yielded a number.  The other three resulted in "No Nf found."
		"Wafer 1" below is the wafer that got an RI of 2.37.  "Wafer
		2" is one of the others.  Note that the three that did not 
		yield an RI all had thicknesses greater than that of Wafer 1.
		Anyone have any thoughts on this?
	
   Uniformity:  

              Wafer Schematic (all numbers in Angstroms)

                   
                ########### 
              ##            ## 
             ##              ##
            ##  1    2    3   #
            #                  #
            #   4    5    6    #
            ##                 #
            ##  7    8    9   # 
             ##              ## 
              ##            ##
                ###########
		  (Flat)

            Loc1 Loc2 Loc3 Loc4 Loc5 Loc6 Loc7 Loc8 Loc9
            ---- ---- ---- ---- ---- ---- ---- ---- ----
Wafer 1:    2293 2308 2321 2265 2221 2325 2314 2276 2325
Wafer 2:    2392 2410 2414 2377 2365 2416 2398 2398 2421

		In the furnace, the wafers were loaded with the flat 
		facing up.




From mbadi at relgyro.stanford.edu  Wed Aug 22 13:07:35 2001
From: mbadi at relgyro.stanford.edu (Mohammed H. Badi)
Date: Wed, 22 Aug 2001 13:07:35 -0700 (PDT)
Subject: More Deposition Data
Message-ID: <Pine.SOL.3.95.1010822130454.5380Q-100000@relgyro.stanford.edu>

Hey all,
  As a follow-up to my email from yesterday.  I did the identical run today
and got similar data.  The "expected values" are the measured results from
last night.

3.	Nitride Deposition 8.22.01 @ 0930 --> 1142 
	Furnace: TylanNitride #10
	Program: LONH378 (2 hours + variable time) 
	Variable Time: 01:12:00
	Wafers: 1-8
	Dummies: D2, D3, DNitride (data taken off of DNitride)
	Expectd Rate: 31.94 A/min
	Expected Thickness: 2300
	Expected RI: 2.311
	Measured Rate: 31.11 A/min
	Measured Thickness: 2240 
	Measured RI: 2.315
	
   Uniformity:  

              Wafer Schematic

                   
                ########### 
              ##            ## 
             ##              ##
            ##  1    2    3   #
            #                  #
            #   4    5    6    #
            ##                 #
            ##  7    8    9   # 
             ##              ## 
              ##            ##
                ###########
		  (Flat)

            Loc1 Loc2 Loc3 Loc4 Loc5 Loc6 Loc7 Loc8 Loc9
            ---- ---- ---- ---- ---- ---- ---- ---- ----
	    2263 2252 2262 2237 2211 2269 2248 2251 2285	

		In the furnace, the wafers were loaded with the flat 
		facing up.





From dton at santurcorp.com  Mon Aug 27 10:00:38 2001
From: dton at santurcorp.com (Dinh Ton)
Date: Mon, 27 Aug 2001 10:00:38 -0700
Subject: My time slot for this afternoon is free
Message-ID: <902E88111EFE8F4FB273C926027F72CF02A7A3@S2.santurcorp.com>



Sorry,  I don't think I can make it to Stanford this afternoon.
I can't cancel my time since my remote Coral is not working properly.

Regards, 
Dinh
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From latta at snf.stanford.edu  Thu Aug 30 11:40:16 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Thu, 30 Aug 2001 11:40:16 -0700
Subject: Res removed! 8/31 10:30-3:00
Message-ID: <3B8E8890.CDA26544@snf.stanford.edu>