From jgarate at snf.stanford.edu Mon Feb 5 07:39:24 2001 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Mon, 05 Feb 2001 07:39:24 -0800 Subject: Leak Message-ID: <3A7EC92C.7C47AD34@snf.stanford.edu> Hi Users, The tylannitride is still down for leak. Ray and Mike will be working on it today, but it wont be up till probably tomorrow. Thanks, Jaime Garate From jgarate at snf.stanford.edu Mon Feb 5 08:04:05 2001 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Mon, 05 Feb 2001 08:04:05 -0800 Subject: Nitride Status Message-ID: <3A7ECEF5.F723E0F2@snf.stanford.edu> Hi Users, The Nitride has more problems then a leak. The cylinder recirculator has a problem. Ray needs to fix the controller so that the tank could stabilize. Ray Will keep us updated! Thanks, Jaime Garate From jgarate at snf.stanford.edu Tue Feb 6 14:09:32 2001 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Tue, 06 Feb 2001 14:09:32 -0800 Subject: Status Message-ID: <3A80761C.3585E16E@snf.stanford.edu> Hi Users, I was processing a coat run when the system had a DCS failure. Ray has fixed the problem, and Eric P. will coat the nitride tube for me. I will do a characterization test tomorrow, and release it after I get the results. Thanks, Jaime Garate From jgarate at snf.stanford.edu Wed Feb 7 07:26:48 2001 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Wed, 07 Feb 2001 07:26:48 -0800 Subject: Status Message-ID: <3A816938.80623315@snf.stanford.edu> Hi Users, Tylannitride has been coated and characterized. It is back up for production. Thanks, Jaime Garate From latta at snf.stanford.edu Fri Feb 9 17:14:22 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 9 Feb 2001 17:14:22 -0800 (PST) Subject: Low Stress Nitride results Message-ID: Folks, Yesterday Jaime and I ran an LONH378 deposition and got the following results; Etch Rate ~33A/min Stress 55MPa tensile The run was targeted for 5000A and we mesured 5386A average on the test wafer. Nancy From ejwong at stanford.edu Sun Feb 11 19:16:22 2001 From: ejwong at stanford.edu (Eehern Wong) Date: Sun, 11 Feb 2001 19:16:22 -0800 Subject: Low Stress Nitride results In-Reply-To: Message-ID: <5.0.2.1.2.20010211190414.02b75f48@gumbi.pobox.stanford.edu> Hello tylannitride, Some people have been wondering about the quality of the nitride deposited this past week. On a nitride run Sanli did on friday we found the following: Deposition Rate: 33 A/min Refractive Index: 2.4 Good news! This is actually now consistent with the tube's result before it was rebuilt (ie pretty normal). This data was taken off wafers deposited with 2650 A LONH378. One more note: for films of nitride, it may be better to use ellipsometer to measure thickness for the logbook, since elllipsometer measures refractive index and uses that to determine thickness, whereas nanospec assumes a refractive index of 2 for nitride, which can give numbers a little off. Or if you type in 2.4 manually for nanospec, you can also measure thickness a little more accurately (if you are using LONH378 and the tube stays consistent). Eehern At 05:14 PM 2/9/2001 -0800, Nancy Latta wrote: >Folks, > >Yesterday Jaime and I ran an LONH378 deposition and got the following >results; > >Etch Rate ~33A/min >Stress 55MPa tensile > >The run was targeted for 5000A and we mesured 5386A average on the test >wafer. > > Nancy From ejwong at stanford.edu Mon Feb 12 09:17:54 2001 From: ejwong at stanford.edu (Eehern Wong) Date: Mon, 12 Feb 2001 09:17:54 -0800 Subject: Low Stress Nitride results In-Reply-To: <5.0.2.1.2.20010211190414.02b75f48@gumbi.pobox.stanford.edu > References: Message-ID: <5.0.2.1.2.20010212090350.049d3790@gumbi.pobox.stanford.edu> Hi Again, Here is a compilation of results we've been getting for LONH378 Before the shutdown in Dec -------------------------- Deposition Rate: ~35 A/min Refraction Index: ~2.4 After Jan --------- Deposition Rate: ~25 A/min Refraction Index: ~2.4 After the most recent rebuild ----------------------------- First Deposition by Eric Perozziello (ericp at snf) Deposition Rate: ~25 A/min Refraction Index: ~2.7 Most recent run by Sanli Ergun <2/9/01> Deposition Rate: ~33 A/min Refraction Index: ~2.4 To summarize, it seems that the tube is back to it's pre-shutdown state. These data points were pulled off samples ran under ellipsometer. Hope this helps, Eehern Wong Khuri-Yakub Group ejwong at snf At 07:16 PM 2/11/2001 -0800, Eehern Wong wrote: >Hello tylannitride, > >Some people have been wondering about the quality of the nitride deposited >this past week. On a nitride run Sanli did on friday we found the following: > >Deposition Rate: 33 A/min >Refractive Index: 2.4 > >Good news! This is actually now consistent with the tube's result before >it was rebuilt (ie pretty normal). This data was taken off wafers >deposited with 2650 A LONH378. > >One more note: for films of nitride, it may be better to use ellipsometer >to measure thickness for the logbook, since elllipsometer measures >refractive index and uses that to determine thickness, whereas nanospec >assumes a refractive index of 2 for nitride, which can give numbers a >little off. Or if you type in 2.4 manually for nanospec, you can also >measure thickness a little more accurately (if you are using LONH378 and >the tube stays consistent). > >Eehern > >At 05:14 PM 2/9/2001 -0800, Nancy Latta wrote: >>Folks, >> >>Yesterday Jaime and I ran an LONH378 deposition and got the following >>results; >> >>Etch Rate ~33A/min >>Stress 55MPa tensile >> >>The run was targeted for 5000A and we mesured 5386A average on the test >>wafer. >> >> Nancy > From jgarate at snf.stanford.edu Wed Feb 14 06:40:31 2001 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Wed, 14 Feb 2001 06:40:31 -0800 Subject: Nitride Message-ID: <3A8A98DF.ED379E65@snf.stanford.edu> Hi Users, I don't remember if I have send out this information for nitride, but here it is if you are interested. STRESS: 50 mpa tensile UNIFORMITY: wafer to wafer 5% non uniformity within wafer 4% non uniformity Thanks, Jaime Garate From mbadi at relgyro.Stanford.EDU Wed Feb 14 13:08:28 2001 From: mbadi at relgyro.Stanford.EDU (Mohammed H. Badi) Date: Wed, 14 Feb 2001 13:08:28 -0800 (PST) Subject: Cancelled thurs reservation 9-1630 Message-ID: Hi all, I'm writing to state that I'm cancelling my reservation tomorrow from 9-1630. I had surgery yesterday and am not mobile so can't come to campus to remove my reservation from coral. Nevertheless, please consider it cancelled and feel free to use the tube during that time. Thanks. moe. mbadi at snf -------- Mohammed H. Badi 650-906-0663 From mbadi at piezo.Stanford.EDU Sun Feb 18 17:39:17 2001 From: mbadi at piezo.Stanford.EDU (Mohammed H. Badi) Date: Sun, 18 Feb 2001 17:39:17 -0800 (PST) Subject: LONH378 Deposition info Message-ID: Hi all, Sean Hansen and I did a nitride deposition today and we thought we'd share our results: 1. Nitride Deposition Furnace: TylanNitride #10 Program: LONH378 (2 hours + variable (01:15:30)) Estimated rate: 33.11 A/min Estimated thickness: 2500 A Measured rate: 34.34 A/min Measured Thickness: see below Measured RI: 2.409 2. Ellipsometer/Nanospec Purpose: Find Nitride refraction/thickness/uniformity N expected: 2.4 N measured (ellipsometer): 2.409 Uniformity: Wafer Schematic ########### ## ## ## ## ## 1 2 3 # # # # 4 5 6 # ## # ## 7 8 9 # ## ## ## ## ########### (FLAT) Loc1 Loc2 Loc3 Loc4 Loc5 Loc6 Loc7 Loc8 Loc9 ---- ---- ---- ---- ---- ---- ---- ---- ---- 2607 2586 2615 2598 2550 2600 2601 2586 2596 From seymour at snf.stanford.edu Tue Feb 20 10:02:09 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 20 Feb 2001 10:02:09 -0800 Subject: Baffle replacement Message-ID: <3A92B121.124AD1CD@snf.stanford.edu> The system is down for replacing the broken baffles. It should be up by 10:30 AM From mdickey at snf.stanford.edu Thu Feb 22 12:02:25 2001 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Thu, 22 Feb 2001 12:02:25 -0800 Subject: door sensor Message-ID: <3A957051.61A6E51@snf.stanford.edu> Door sensor is not working. System is down. From sthansen at stanford.edu Thu Feb 22 16:25:52 2001 From: sthansen at stanford.edu (Sean T. Hansen) Date: Thu, 22 Feb 2001 16:25:52 -0800 (PST) Subject: reservation cancelled Message-ID: I have cancelled my reservations on tylannitride tonight (Thursday) and Saturday afternoon. My wafers will not be ready. -Sean Hansen From seymour at snf.stanford.edu Fri Feb 23 07:42:29 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 23 Feb 2001 07:42:29 -0800 Subject: system is up Message-ID: <3A9684E5.A6C1FAD6@snf.stanford.edu> I replaced the door sensor and checked system operation.