From linwhit at nortelnetworks.com Tue Jul 3 08:45:10 2001 From: linwhit at nortelnetworks.com (Linda Whittelsey) Date: Tue, 3 Jul 2001 08:45:10 -0700 Subject: remove reservation noon to 5 7/3/01 Message-ID: <4F973E944951D311B6660008C7917CF0046D7025@zsc4c008.us.nortel.com> I will not be using my reservation as it appears the tube will be shut down for quartz repairs. Linda Whittelsey MEMS Process Engineer Xros, a Division of Nortel Networks 2305 Mission College Blvd. Mail Stop B2130 Santa Clara, CA 95054 408-565-4651 direct 408-565-3474 fax linwhit at nortelnetworks.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Jul 6 10:27:30 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 06 Jul 2001 10:27:30 -0700 Subject: system up Message-ID: <3B45F501.AF797B46@snf.stanford.edu> cold and hot leak check passed. tube is up to use. From sanli at piezo.Stanford.EDU Tue Jul 10 16:54:45 2001 From: sanli at piezo.Stanford.EDU (Sanli Ergun) Date: Tue, 10 Jul 2001 16:54:45 -0700 (PDT) Subject: reservation cancellation Message-ID: Sorry for the late notice. I was hoping to get my wafers ready, but I couldn't. I'm cancelling my reservations. ________________________________________________________ Arif Sanli Ergun Engineering Research Associate E. L. Ginzton Laboratory, Room : 130, Stanford University, Stanford, CA, 94305-4085 Phone: (650) 723-8447 Fax : (650) 725-7509 www : http://piezo.stanford.edu/group/IRP/sanliIRP.html From jhemanth at stanford.edu Thu Jul 12 10:03:48 2001 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Thu, 12 Jul 2001 10:03:48 -0700 (PDT) Subject: Reservation cancelled Message-ID: My wafers are not yet ready so I am cancelling my reservation for today. Tylan nitride is free from 10am to 3pm Hemanth ------------------------------------------------------------------------------------------------------------- Hemanth Jagannathan Work: Home: Room AP108, Ginzton Labs Latham Square, Apt #64, 445 Via Palou Street 2250 Latham Street, Stanford University Mountain View, Stanford, CA 94305 CA 94040 Phone: 650-725-2990 ------------------------------------------------------------------------------------------------------------- From mbadi at relgyro.stanford.edu Tue Jul 24 16:58:56 2001 From: mbadi at relgyro.stanford.edu (Mohammed H. Badi) Date: Tue, 24 Jul 2001 16:58:56 -0700 (PDT) Subject: Tube Free Wed morning Message-ID: Hi all, I removed my reservation for Wed morning. Sorry for the late notice. moe. -------- Mohammed H. Badi "It's not easy being green." 650-906-0663 From mbartsch at Stanford.EDU Wed Jul 25 10:27:08 2001 From: mbartsch at Stanford.EDU (Michael S. Bartsch) Date: Wed, 25 Jul 2001 10:27:08 -0700 (PDT) Subject: Res removed - Wed 10pm Message-ID: <200107251727.f6PHR8v25674@myth5.Stanford.EDU> The nitride tube is now free beginning at 10pm tonight. msb From mbadi at relgyro.stanford.edu Thu Jul 26 18:52:49 2001 From: mbadi at relgyro.stanford.edu (Mohammed H. Badi) Date: Thu, 26 Jul 2001 18:52:49 -0700 (PDT) Subject: Nitride Tube results Message-ID: hey all, I ran some wafers through the nitride furnace the other day. thought i'd share my results: 8. Nitride Deposition 7/24/01 Furnace: TylanNitride #10 Program: LONH378 (2 hours + variable time) Variable Time: 03:00:00 Wafers: 1,2,3,4 Dummies: D Expectd Rate: N/A Expected Thickness: N/A Measured Rate: 31.11 A/min Measured Thickness: 5600 A Measured RI: 2.37 Note: wafer order: baffle, baffle, dummy, 1,2,3,4,baffle (R->L) Wafer Uniformity ---------> ########### ## ## ## ## ## 1 2 3 # # # # 4 5 6 # ## # ## 7 8 9 # ## ## ## ## ########### (Flat) Loc1 Loc2 Loc3 Loc4 Loc5 Loc6 Loc7 Loc8 Loc9 ---- ---- ---- ---- ---- ---- ---- ---- ---- 5692 5575 5404 5605 5650 In the furnace, the wafers were loaded with the flat facing up. From rcrane at snf.stanford.edu Mon Jul 30 16:19:01 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 30 Jul 2001 16:19:01 -0700 Subject: Toxic gas shutdown Aug. 6 Message-ID: <3B65EB65.1A0E4C61@snf.stanford.edu> On Monday, August 6, 2001, from 0800 to 1600, the toxic gas distribution system will shut down to allow reprogramming and testing of the gas detection system as part of the fire alarm upgrade. The following tools will be affected: STSdep, EPI, PECVD, Plasmaquest, LAMpoly, P5000etch, AMTetcher, TylanSiGe, Tylanpoly, TylanBPSG, Tylannitride, and Tystar. The system will be tested during the day with occasional audio and strobe test alarms. Please disregard toxic (blue light) alarms from 0800 to 1600 on Monday, August 6. Thanks, Dick