From sanli at piezo.Stanford.EDU  Thu Nov  1 13:16:46 2001
From: sanli at piezo.Stanford.EDU (Sanli Ergun)
Date: Thu, 1 Nov 2001 13:16:46 -0800 (PST)
Subject: metal and non-metal wands
Message-ID: <Pine.GSO.4.33.0111011311550.12655-100000@piezo.Stanford.EDU>


Today I found that metal and non-metal wands were mixed. That is the
non-metal wand was hanging in the metal wand hanger, and vice versa. I
don't know how long it has been like this, but there is a good chance that
the recent users accidentally used the metal wand instead of the non-metal
wand and the non-metal wand instead of the metal wand. Therefore, both of
them are now metal wands. I suggest you to use clean non-metal tweezers to
load your non-metal wafers until the non-metal wand is cleaned.

________________________________________________________
Arif Sanli Ergun
Engineering Research Associate
E. L. Ginzton Laboratory,
Room : 130,
Stanford University,
Stanford, CA, 94305-4085
Phone: (650) 723-8447
Fax  : (650) 725-7509
www  : http://piezo.stanford.edu/group/IRP/sanliIRP.html



From latta at snf.stanford.edu  Fri Nov  2 10:30:02 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Fri, 2 Nov 2001 10:30:02 -0800 (PST)
Subject: metal and non-metal wands
In-Reply-To: <Pine.GSO.4.33.0111011311550.12655-100000@piezo.Stanford.EDU>
Message-ID: <Pine.LNX.4.04.10111021028560.30143-100000@snf.stanford.edu>

Folks,

Mike has cleaned and replaced the nonmetal wand tip.  He also has put a
label on the wand handle indicating it is nonmetal.

Fell free to use the wands again.

				Nancy




From beckwith at snf.stanford.edu  Fri Nov  2 13:01:59 2001
From: beckwith at snf.stanford.edu (Sharleen Beckwith)
Date: Fri, 2 Nov 2001 13:01:59 -0800
Subject: metal and non-metal wands
In-Reply-To: <Pine.LNX.4.04.10111021028560.30143-100000@snf.stanford.edu>
References: <Pine.LNX.4.04.10111021028560.30143-100000@snf.stanford.edu>
Message-ID: <p0433010db8089be81c67@[171.64.99.54]>

Is there any way to figure out whether the tubes are now metal 
contaminated? I guess tylanbpsg is safe because it was down and being 
cleaned during the wand-swap? Some of us worry about these things.

>Delivered-To: beckwith at snf.stanford.edu
>Mailing-List: contact tylanbpsg-help at snf.stanford.edu; run by ezmlm
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>Date: Fri, 2 Nov 2001 10:30:02 -0800 (PST)
>From: Nancy Latta <latta at snf.stanford.edu>
>To: Sanli Ergun <sanli at piezo.Stanford.EDU>
>cc: tylannitride at snf.stanford.edu, tylanpoly at snf.stanford.edu,
>     tylanbpsg at snf.stanford.edu
>Subject: Re: metal and non-metal wands
>
>Folks,
>
>Mike has cleaned and replaced the nonmetal wand tip.  He also has put a
>label on the wand handle indicating it is nonmetal.
>
>Fell free to use the wands again.
>
>				Nancy

Do you mean it has been replaced with a new, clean, tip, or the old 
one was cleaned? Because I don't see how you can clean metal off of 
those tips since there is a metal rod imbedded in the quartz.

>Delivered-To: beckwith at snf.stanford.edu
>Mailing-List: contact tylanbpsg-help at snf.stanford.edu; run by ezmlm
>X-No-Archive: yes
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>Delivered-To: mailing list tylanbpsg at snf.stanford.edu
>Date: Tue, 30 Oct 2001 09:48:12 -0800
>From: Mike Dickey <mdickey at snf.stanford.edu>
>X-Accept-Language: en
>To: tylanbpsg at snf.stanford.edu, tylan at pcs.stanford.edu
>Subject: Pull and Clean
>
>We are going to put the BPSG tube down for a pull and clean tomorrow morning.

Sharleen

P. S. Thanks to Sanli for catching this and quickly reporting it!


From latta at snf.stanford.edu  Wed Nov  7 11:23:03 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Wed, 7 Nov 2001 11:23:03 -0800 (PST)
Subject: Si dummy wafer
Message-ID: <Pine.LNX.4.04.10111071120580.27703-100000@snf.stanford.edu>

Folks,

The last quartz wafer has been broken, so I have replaced it with a Si
wafer.  Please treat this Si wafers as a dummy wafer, i.e., move it around
the boat as needed, but leave it in place at the end of your run.

We will order more quartz wafers.

				Nancy



From seymour at snf.stanford.edu  Mon Nov 12 13:57:31 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Mon, 12 Nov 2001 13:57:31 -0800
Subject: burnbox cleans
Message-ID: <3BF045CB.5BF09F81@snf.stanford.edu>

I have had to clean the burnbox three times in the last eight days. This
is primarily due to the increased usage of tylannitride low stress
nitride. Prior to the last few weeks the box required cleaning every two
weeks with a few exceptions. During the times of lower usage I would
schedule the clean for every other Monday morning from 6 am till about 9
am to allow cooling down and the clean. These faster coming cleans do
not allow me to schedule the clean and this requires the shutting down
of the above tool with little to no notice. I am sorry for the
inconvenience this will cause. We are looking into the nitride process
and equipment to see if we can  slow down the burnbox getting clogged
and needing a clean.
Ray Seymour
47425






From sanli at piezo.Stanford.EDU  Mon Nov 12 17:43:49 2001
From: sanli at piezo.Stanford.EDU (Sanli Ergun)
Date: Mon, 12 Nov 2001 17:43:49 -0800 (PST)
Subject: reservation cancellation
Message-ID: <Pine.GSO.4.33.0111121742250.9665-100000@piezo.Stanford.EDU>


Sorry for the late notice. I cannot make my reservations this afternoon
and evening. Please use them.

________________________________________________________
Arif Sanli Ergun
Engineering Research Associate
E. L. Ginzton Laboratory,
Room : 130,
Stanford University,
Stanford, CA, 94305-4085
Phone: (650) 723-8447
Fax  : (650) 725-7509
www  : http://piezo.stanford.edu/group/IRP/sanliIRP.html



From seymour at snf.stanford.edu  Wed Nov 14 10:45:10 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Wed, 14 Nov 2001 10:45:10 -0800
Subject: pull and clean
Message-ID: <3BF2BBB6.F106B1B8@snf.stanford.edu>

The nitride tube will be down for a clean starting Monday (Nov. 19) at 6
AM. The tube should be back up on Tuesday afternoon.
Ray Seymour
47425



From seymour at snf.stanford.edu  Fri Nov 16 16:08:56 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Fri, 16 Nov 2001 16:08:56 -0800
Subject: tube clean
Message-ID: <3BF5AA98.B00C6D74@snf.stanford.edu>

The pump was replaced and the tube was cleaned. The cold and hot leak
check passed. Tube is up to run.




From seymour at snf.stanford.edu  Mon Nov 19 07:11:08 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Mon, 19 Nov 2001 07:11:08 -0800
Subject: Silane bal N2 cylinder change
Message-ID: <3BF9210C.32495789@snf.stanford.edu>

The cylinder has been changed and the leak check passed. the tool is up
to run.



From seymour at snf.stanford.edu  Mon Nov 19 14:37:39 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Mon, 19 Nov 2001 14:37:39 -0800
Subject: tube is up
Message-ID: <3BF989B3.B45250B4@snf.stanford.edu>

The door problem has been addressed and the tube is now ready to run.



From mcvittie at cis.Stanford.EDU  Wed Nov 21 14:22:01 2001
From: mcvittie at cis.Stanford.EDU (Jim McVittie)
Date: Wed, 21 Nov 2001 14:22:01 -0800 (PST)
Subject: MFC Testing
Message-ID: <Pine.SOL.4.05.10111211356001.7308-100000@cis>

Tylan Nitride Users,

Recently, we have been seeing bubbles in our low stress nitride. In
addition, for some time we have been using a non-standard DCS/NH3 flow
ratio to achieve low stress. Both of these issues could be caused by the
mass flow controllers (MFCs) being out of calibration. On Sunday (12/1) we
are going shut down the Tylan nitride tube for about 24 hrs to do in-situ
calibrations of the DCS and NH3 MFCs. To do these calibrations, we will
turn off the furnace on Sunday evening, do rate of rise pressure
measurement for different N2 flow through the MFCs on Monday morning and
have the tube heat back up on Monday afternoon.

		Thanks,	Jim 	
--------------------------------------------------------------
James P. McVittie	                Senior Research Scientist
Allen Center for Integrated Systems     jmcvittie at stanford.edu
Stanford University             	Tel: (650) 725-3640	
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075