From seymour at snf.stanford.edu Tue Sep 4 10:21:22 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 04 Sep 2001 10:21:22 -0700 Subject: tube clean Message-ID: <3B950D92.AB154C85@snf.stanford.edu> I will be doing a tube clean on this tool starting Thursday morning. I sorry for the short notice but the tube seemed to get to 35 microns really quickly. Ray From latta at snf.stanford.edu Fri Sep 7 15:24:49 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 7 Sep 2001 15:24:49 -0700 (PDT) Subject: Back in business! Message-ID: I completed the uniformity tests and the system passed. Data available on the web in the equip mailist archives. Dep rate for LONH378 is about 28-29A/min.