stress of Nitride2

Samuel B. Schaevitz SamS at
Thu Aug 8 20:32:07 PDT 2002

Does anyone know what the intrinsic stress in nitride2 films is? Roughly?


Samuel B. Schaevitz
Lilliputian Systems, Inc.
6 Keenan Drive
Winchester, MA 01890

E-Mail: SamS at
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