stress of Nitride2

Samuel B. Schaevitz SamS at LSInc.biz
Thu Aug 8 20:32:07 PDT 2002


Does anyone know what the intrinsic stress in nitride2 films is? Roughly?

Thanks,
Sam

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Samuel B. Schaevitz
Lilliputian Systems, Inc.
6 Keenan Drive
Winchester, MA 01890

E-Mail: SamS at LSInc.biz
Mobile: (617) 543-5875




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