stress of Nitride2

Balaji Venkateshwaran intelbalaji at yahoo.com
Sun Aug 11 12:16:09 PDT 2002


Last time I checked, it was about 1GPa.

Balaji


--- "Samuel B. Schaevitz" <SamS at LSInc.biz> wrote:
> Does anyone know what the intrinsic stress in
> nitride2 films is? Roughly?
> 
> Thanks,
> Sam
> 
>
------------------------------------------------------
> Samuel B. Schaevitz
> Lilliputian Systems, Inc.
> 6 Keenan Drive
> Winchester, MA 01890
> 
> E-Mail: SamS at LSInc.biz
> Mobile: (617) 543-5875
> 


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