From rcrane at snf.stanford.edu Mon Feb 4 11:48:44 2002 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 04 Feb 2002 11:48:44 -0800 Subject: DCS, removal of advisory Message-ID: <3C5EE59C.37493435@snf.stanford.edu> Nitride users, Summary: The problem of dichlorosilane (DCS) condensing in the delivery line during very cold nights has been corrected. The advisory recommending not running the nitride tube late night on an unusually cold evening is hereby rescinded. I made the assumption that cold weather temperature is condensing the dichlorosilane (DCS) in the delivery line. Recent steps taken including reducing airflow in the cabinet to minimum required flow and thermally isolating the purge panel have proven to have a positive effect. The area of concern now has temperature monitoring for min and max. I'll keep you posted. Thanks for patience and assistance, Dick From eap at gloworm.Stanford.EDU Mon Feb 4 17:34:42 2002 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Mon, 4 Feb 2002 17:34:42 -0800 (PST) Subject: Tube free tonight Message-ID: <200202050134.RAA27482@gloworm.Stanford.EDU> Sorry for the late notice- if you need tylannitride, it is free tonight. From mbadi at relgyro.stanford.edu Tue Feb 5 17:58:20 2002 From: mbadi at relgyro.stanford.edu (Mohammed H. Badi) Date: Tue, 5 Feb 2002 17:58:20 -0800 (PST) Subject: free tonight Message-ID: tube is free tonight. sorry for the late notice. moe. -------- Mohammed H. Badi "Great...an ME and an EE playing with 650-906-0663 fire." From rohits at stanford.edu Fri Feb 15 01:42:23 2002 From: rohits at stanford.edu (Rohit Shenoy) Date: Fri, 15 Feb 2002 01:42:23 -0800 Subject: tylannitride shutdown Message-ID: <008f01c1b605$1216a450$2a6440ab@quasar> Nitride users, The nitride furnace is shutdown due to possible metal contamination. I was working with another student in my group and he accidentally used metal contaminated tweezers to transfer wafers to the wbdiff cassette for the diffusion clean before nitride dep. This came to our attention only after the wafers were loaded and recipe started. The diffusion wet bench has already been shut down and will be decontaminated on Fri morning. I have shut down the nitride furnace to prevent further spread of any possible metal contamination. Sorry for the inconvenience caused, -- Rohit From dlaser at stanford.edu Tue Feb 19 12:40:34 2002 From: dlaser at stanford.edu (Daniel James Laser) Date: Tue, 19 Feb 2002 12:40:34 -0800 (PST) Subject: tylannitride res canc 13:30-18:30 today Message-ID: sorry for the late notice. From yyao at snf.stanford.edu Tue Feb 19 17:44:09 2002 From: yyao at snf.stanford.edu (Yahong Yao) Date: Tue, 19 Feb 2002 17:44:09 -0800 Subject: cancel resvervation 1830--2100 Message-ID: <3C72FF69.86DDAC3F@snf.stanford.edu> From latta at snf.stanford.edu Fri Feb 22 10:50:26 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 22 Feb 2002 10:50:26 -0800 (PST) Subject: SYstem free from 1-6 today! Message-ID: Sorry about the late notice.... From seymour at snf.stanford.edu Mon Feb 25 14:13:15 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 25 Feb 2002 14:13:15 -0800 Subject: Re shutdown Message-ID: <3C7AB6FB.64F77FC2@snf.stanford.edu> The faulty valve on the NH3 purge panel has been replaced and the panel is under leak test until tomorrow. If you have any questions please give me a call of email me. Ray 47425 From angela.mcconnell at stanford.edu Tue Feb 26 18:42:52 2002 From: angela.mcconnell at stanford.edu (Angie McConnell) Date: Tue, 26 Feb 2002 18:42:52 -0800 Subject: tylannitride free tonight 8PM-midnight Message-ID: <4.3.2.7.2.20020226184206.00ae29e0@adm11.pobox.stanford.edu> From ejwong at stanford.edu Wed Feb 27 10:24:30 2002 From: ejwong at stanford.edu (ejwong at stanford.edu) Date: Wed, 27 Feb 2002 10:24:30 -0800 (PST) Subject: Tylannitride available 1030-1400 today In-Reply-To: <200104122104.f3CL4gj25650@myth2.Stanford.EDU> Message-ID: wafers not ready. sorry for the lae notice