From seymour at snf.stanford.edu Wed Jan 2 10:06:02 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 02 Jan 2002 10:06:02 -0800 Subject: diclor cylinder change Message-ID: <3C334C0A.C4617693@snf.stanford.edu> Teh cylinder has been changed and the line is under leak check. The tool will be up tomorrrow morning about 9 am if all is okay. From dton at santurcorp.com Tue Jan 8 12:10:05 2002 From: dton at santurcorp.com (Dinh Ton) Date: Tue, 8 Jan 2002 12:10:05 -0800 Subject: Time is free from 2:00-6:00 Message-ID: <902E88111EFE8F4FB273C926027F72CF02A874@S2.santurcorp.com> Sorry, my wafers are not ready. Dinh Ton -------------- next part -------------- An HTML attachment was scrubbed... URL: From cm_richter at yahoo.com Wed Jan 16 11:49:57 2002 From: cm_richter at yahoo.com (Claudia M. Richter) Date: Wed, 16 Jan 2002 11:49:57 -0800 (PST) Subject: cancelled reservation 9:30am-3:300pm Message-ID: <20020116194957.21371.qmail@web20004.mail.yahoo.com> My wafers are not ready __________________________________________________ Do You Yahoo!? Send your FREE holiday greetings online! http://greetings.yahoo.com From cm_richter at yahoo.com Wed Jan 16 11:51:08 2002 From: cm_richter at yahoo.com (Claudia M. Richter) Date: Wed, 16 Jan 2002 11:51:08 -0800 (PST) Subject: cancelled reservation Monday 9:30am-3:300pm Message-ID: <20020116195108.42231.qmail@web20009.mail.yahoo.com> My wafers will not be ready on Monday January 21st __________________________________________________ Do You Yahoo!? Send FREE video emails in Yahoo! Mail! http://promo.yahoo.com/videomail/ From seymour at snf.stanford.edu Tue Jan 22 08:53:05 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 22 Jan 2002 08:53:05 -0800 Subject: System needs to be cleaned Message-ID: <3C4D98F0.5B123D55@snf.stanford.edu> The tube is in need of cleaning and will have to be shut down to start the clean this afternoon at 2:00 pm. From cm_richter at yahoo.com Tue Jan 22 13:40:02 2002 From: cm_richter at yahoo.com (Claudia M. Richter) Date: Tue, 22 Jan 2002 13:40:02 -0800 (PST) Subject: cancelled reservation Message-ID: <20020122214002.92478.qmail@web20007.mail.yahoo.com> Cancelled reservation for Thursday from 9am-1:30pm __________________________________________________ Do You Yahoo!? Send FREE video emails in Yahoo! Mail! http://promo.yahoo.com/videomail/ From mbadi at relgyro.stanford.edu Fri Jan 25 13:47:59 2002 From: mbadi at relgyro.stanford.edu (Mohammed H. Badi) Date: Fri, 25 Jan 2002 13:47:59 -0800 (PST) Subject: saturday free Message-ID: i cancelled my sat reservation...wafers weren't cooperating. moe. -------- Mohammed H. Badi I'm just sipping on chamomile. 650-906-0663 From mbadi at relgyro.stanford.edu Sun Jan 27 19:15:57 2002 From: mbadi at relgyro.stanford.edu (Mohammed H. Badi) Date: Sun, 27 Jan 2002 19:15:57 -0800 (PST) Subject: cancelled res. mon morning Message-ID: i've cancelled my res on monday morning...there have been mutliple reports of DCS problems over the weekend. moe. -------- Mohammed H. Badi I'm just sipping on chamomile. 650-906-0663 From rcrane at snf.stanford.edu Mon Jan 28 15:41:07 2002 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 28 Jan 2002 15:41:07 -0800 Subject: DCS problem status Message-ID: <3C55E193.EE33D9FC@snf.stanford.edu> Summary: dichlorosilane (DCS) appears to be condensing in the delivery line during very cold nights. I recommend not running the nitride tube late night on an unusually cold evening. Given that this week's temperatures are predicted to have lows in the low thirties, running any evening this week is not recommended. This is a temporary "fix", see the follow report for details. I am making the assumption that cold weather is condensing the dichlorosilane (DCS) in the delivery line. When the loss of (DCS) flow was first notice last month we took the following action: 1. Temperature of the DCS bottle and all three delivery heater tapes were checked for normal operation. 2. Thermal insulation for the delivery line was checked and material added as needed. 3. Delivery line was evacuated to remove any condensed DCS liquid. None was found. 4. Other possible problems and remedies were discussed. Since the DCS line was now working, it was not clear if we "fixed" or the conditions for failure simply would away. When the next round of failures occurred, I speculated that the purge panel mounting plate in the gas cabinet in the gas flammable gas vault was acting as a radiator removing heat from the DCS line. Once liquid has condensed in the line, it must evaporate prior to recovering full flow. When the blockage evaporates, the excess flow switch (part of the gas delivery safety system) may activate, fully shutting down the gas line. Given the hazardous class, group 2 (H-2 occupancy) location, normal solutions such as heat lamps are not permissible. DCS has a toxic, corrosive, and flammable gas classification. Activities taken: 1. Order recording min/max thermometers for checking DCS line temperature at suspected problem locations. (Arrive this week.) 2. Initiate permitting inquiry to move DCS bottles to conditioned space. (Not likely.) 3. Inquire as to how other fabs deal with the problem. Berkeley has the DCS bottle in the fab. Most fabs have the DCS inside and/or do a purge prior to each run. Now with loss of DCS this Saturday (Sunday's report was caused by Saturday's shutdown) we have done the following: 1. Reduced air flow in the gas cabinet to minimum allowed flow. 2. Wrapped the entire purge panel with insulation. 3. Determined that the problem was addressed two years ago and reviewed the steps taken at that time. 4. Determined that using additional heat tape is legal if dual controllers are used. 5. Ordered appropriate heater tape. 6. Corrected six feet of unwrapped line in the basement. After I heat wrap and insulate the gas panel, I will need a user to run a nitride process late on a cold night as a test. Thanks for patience and assistance, Dick