From beckwith at snf.stanford.edu Fri Nov 8 10:21:47 2002 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Fri, 8 Nov 2002 10:21:47 -0800 Subject: tylannitride cancelled reservation Message-ID: I thought I would be around until 10 pm tonight so I could do the nitride run while working in the litho room, but my plans have changed and I came in early. So I will not be using my reservation starting at noon. I will wonder on down and remove it soon. Plus, I am not sure the tube is up to snuff by now anyway. Sharleen -- "To announce that there must be no criticism of the president, or that we are to stand by the president right or wrong, is not only unpatriotic and servile, but is morally treasonable to the American public." Theodore Roosevelt writing in the Kansas City Star May 7, 1918 -- From eap at gloworm.Stanford.EDU Fri Nov 8 10:23:38 2002 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Fri, 8 Nov 2002 10:23:38 -0800 (PST) Subject: tylannitride cancelled reservation In-Reply-To: Message-ID: I'll take it!! Thanks, -Eric On Fri, 8 Nov 2002, Sharleen Beckwith wrote: > I thought I would be around until 10 pm tonight so I could do the > nitride run while working in the litho room, but my plans have > changed and I came in early. So I will not be using my reservation > starting at noon. I will wonder on down and remove it soon. > > Plus, I am not sure the tube is up to snuff by now anyway. > > Sharleen > -- > "To announce that there must be no criticism of the president, > or that we are to stand by the president right or wrong, > is not only unpatriotic and servile, > but is morally treasonable to the American public." > > Theodore Roosevelt > writing in the Kansas City Star > May 7, 1918 > -- > From tberg at snf.stanford.edu Tue Nov 12 07:27:53 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 12 Nov 2002 07:27:53 -0800 Subject: Power fail alarm Message-ID: <3DD11DF9.FE69EB5@snf.stanford.edu> We have checked the system out no problems since last Thursday. Maybe a weather relasted glitch. From cm_richter at att.net Wed Nov 13 15:56:12 2002 From: cm_richter at att.net (cm_richter at att.net) Date: Wed, 13 Nov 2002 23:56:12 +0000 Subject: Cancelled Reservation for Monday Nov 18 from 9am to 6:30am Message-ID: <20021113235614.DVOK21264.mtiwmhc14.worldnet.att.net@mtiwebc18> Due to changes in my work schedule, I will not be able to use the nitride tube at this scheduled time. The 9am to 6:30pm time slot is available for use. I've emailed Maurice about removing the reservation for me. Claudia From okilic at stanford.edu Thu Nov 14 15:27:35 2002 From: okilic at stanford.edu (Onur Kilic) Date: Thu, 14 Nov 2002 15:27:35 -0800 (PST) Subject: Nitride available 18:00-23:00 Message-ID: I could squeeze into unused time slots. I'll be done before 18:00. We reaaranged the time with yahong, so that tylannitride is free between 18:00-23:00. ONUR KILIC Graduate Student Applied Physics Stanford University Tel: (650) 498 1371 Address: 750 Escondido Rd 138-B Stanford, CA 94305 Web: www.stanford.edu/~okilic From mdickey at snf.stanford.edu Wed Nov 20 09:56:00 2002 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Wed, 20 Nov 2002 09:56:00 -0800 Subject: Bottle change Message-ID: <3DDBCCAF.9C308630@snf.stanford.edu> The Dichlorsilane bottle for Tylan Nitride will be changed tomorrow morning. It will be back up on friday. Please plan accordingly. From tberg at snf.stanford.edu Wed Nov 20 13:52:49 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 20 Nov 2002 13:52:49 -0800 Subject: Why the Burn Box is our Friend Message-ID: <3DDC0430.D75A0D9F@snf.stanford.edu> Greetings all, As some or all of you might know the tools listed all go to one CDO(BurnBox), The job of the burn box is to take whatever nasty stuff we run in the furnaces, that does not react to make our desired film, and break it down to a water soluable by-product. This is a tough job for our friend the burn box especially if we run 14:1 DCS to NH3 ratio where a large amount of gas goes unreacted. In normal operation just a slight amount of excess gas enters the burn box which runs at 850 degrees C and it is burned. This by-product is then washed down with a spray of water to acid waste. What has happened recently is that too much gas is entering the burn box andthe by-product mostly silicon dioxide and maybe some ammonium chloride and throw in a bit of oil mist from the pumps is building up so fast we are forced to tear the burn box nearly every day or the back pressure becomes too high. Which brings us to point B. We have reserved a short window of time every day between 6:00am and 8:00am. This allows us to cool the burn box and clean it. We would really appreciate it if users could be finished or at least in cool down by 6:00 am. Last point, Next week we will have 4 days of Holiday. Users need to be aware of burn box pressure and not run if pressure is above 3" H2O. Thanks for your help in advance.ted From sahin at stanford.edu Wed Nov 20 14:22:32 2002 From: sahin at stanford.edu (Ozgur Sahin) Date: Wed, 20 Nov 2002 14:22:32 -0800 (PST) Subject: reservation cancelled for 3pm Message-ID: Hi All, Tylannitride is available at 3 to 6 pm. Thanks Ozgur ********************************* Ozgur Sahin Electrical Engineering Department Stanford University home phone (650) 4980778 ********************************* From maurice at snf.stanford.edu Fri Nov 22 14:54:02 2002 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Fri, 22 Nov 2002 14:54:02 -0800 Subject: Uniformity good Green light Message-ID: <3DDEB58A.F4994911@snf.stanford.edu> After the tube clean, a 30 min dep of program "NEWLSN" (new load stress nitride) was run. Across wafer uniformity was 3% or less. Center point uniformity in first boat was 1.36% Center point uniformity across both boats was 9.0% Results below: boat 1 cent top bott righ left wafer1 2888 2928 2932 2963 2945 wafer2 2875 2959 2924 2942 2963 wafer3 2861 2919 2895 2907 2942 boat2 wafer1 2645 2726 2676 2666 2718 wafer2 2638 2701 2676 2683 2717 -maurice