From sanli at stanford.edu Wed Oct 23 17:39:49 2002 From: sanli at stanford.edu (Arif Sanli Ergun) Date: Wed, 23 Oct 2002 17:39:49 -0700 (PDT) Subject: Res. removed 18:30-22:30 today Message-ID: I will not be able to catch my reservation time. Please feel free to use it. Sanli From rcrane at snf.stanford.edu Thu Oct 24 12:08:17 2002 From: rcrane at snf.stanford.edu (Dick Crane) Date: Thu, 24 Oct 2002 12:08:17 -0700 Subject: Burnbox cleaning Message-ID: <3DB84521.A570D6A8@snf.stanford.edu> LPCVD users: In an effort to minimize unscheduled downtime, I am scheduling a two hour PM for Mondays, Wednesdays and Fridays from 0600 through 0800, to allow for routine burn box cleaning. The PM schedule will commence Monday, 10/28/02. This PM program will minimize the randomness of the cleans to permit better scheduling for users. If the scheduled day is a holiday, then the cleaning will be rescheduled to to the preceding or following day How is this different from our present method? Currently the burn box back pressure is monitored and logged daily. If pressure become positive, the burn box is cleaned as soon as there is a coincidental time opening in all the LPCVD tubes. Sometimes this is difficult to achieve without inconveniencing someone. In general, the box is cleaned Monday and Friday mornings and as required during the week. If there are thick nitride and/or LTO depositions, the box loads up more quickly with the cleanings becoming more random. The PM schedule will improve up time. Thanks, Dick From SamS at LSInc.biz Fri Oct 25 12:08:24 2002 From: SamS at LSInc.biz (Samuel B. Schaevitz) Date: Fri, 25 Oct 2002 12:08:24 -0700 Subject: free today (10/25) from 5:00 on Message-ID: <5.1.0.14.2.20021025120802.02ded3d0@pop.lilliputiansystemsinc.com> ------------------------------------------------------ Samuel B. Schaevitz Lilliputian Systems, Inc. 3-H Gill Street, Suite 200 Woburn, MA 01801 E-Mail: SamS at LSInc.biz Mobile: (617) 543-5875 From SamS at LSInc.biz Tue Oct 29 07:05:01 2002 From: SamS at LSInc.biz (Samuel B. Schaevitz) Date: Tue, 29 Oct 2002 07:05:01 -0800 Subject: tylannitride free today (10/29) till 2:00 Message-ID: <5.1.0.14.2.20021029070414.02dbdef8@pop.lilliputiansystemsinc.com> There was a blip in my processing, and I will not be ready. --Sam ------------------------------------------------------ Samuel B. Schaevitz Lilliputian Systems, Inc. 3-H Gill Street, Suite 200 Woburn, MA 01801 E-Mail: SamS at LSInc.biz Mobile: (617) 543-5875 From mdickey at snf.stanford.edu Thu Oct 31 06:35:08 2002 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Thu, 31 Oct 2002 06:35:08 -0800 Subject: Pull and clean Message-ID: <3DC13F9C.F6522C00@snf.stanford.edu> This is to let everyone know that the Nitride tube is coming close to be needing a pull and clean. It is at 26.1 microns and we do pull and cleans at 30. It will probably be done next week. From mdickey at snf.stanford.edu Thu Oct 31 10:58:30 2002 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Thu, 31 Oct 2002 10:58:30 -0800 Subject: Pull and clean Message-ID: <3DC17D56.31036FD9@snf.stanford.edu> Tube is going down for a pull and clean at noon on monday.