From seymour at snf.stanford.edu  Thu Jan  2 11:35:37 2003
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Thu, 02 Jan 2003 11:35:37 -0800
Subject: tube coat and checkout
Message-ID: <3E149489.A80E4D1A@snf.stanford.edu>

I ran nitride1 for 45 mins to coat the tube after pull and clean.



From yyao at snf.stanford.edu  Sat Jan  4 15:07:59 2003
From: yyao at snf.stanford.edu (Yahong Yao)
Date: Sat, 04 Jan 2003 15:07:59 -0800
Subject: tylannitride depo rate low
Message-ID: <3E17694F.A40A48BD@snf.stanford.edu>

Dear Users,

On 01/03/03, I ran LONH378 for 51mins, the deposition rate was 29.6A/min
which was much smaller than before (~35A/min).  For some reason, the
Ellipsometer always gave error when I measured the film.  Then I ran 2nd
run for 1hr.  The deposition rate was about the same.  The RI from
Ellipsometer was ~2.31.

BTW, the DCS flow was 185.8 (set point: 189), LONH3 flow was 14.4 (SP:
13.5).  Deposition pressure was ~262.

Any comment on the low deposition rate?  Thanks a lot.

Yahong



From latta at snf.stanford.edu  Tue Jan 21 13:16:45 2003
From: latta at snf.stanford.edu (Nancy Latta)
Date: Tue, 21 Jan 2003 13:16:45 -0800
Subject: System available until 5:30.
Message-ID: <3E2DB8BD.E0888C91@snf.stanford.edu>


-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu