tylannitride depo rate low
yyao at snf.stanford.edu
Sat Jan 4 15:07:59 PST 2003
On 01/03/03, I ran LONH378 for 51mins, the deposition rate was 29.6A/min
which was much smaller than before (~35A/min). For some reason, the
Ellipsometer always gave error when I measured the film. Then I ran 2nd
run for 1hr. The deposition rate was about the same. The RI from
Ellipsometer was ~2.31.
BTW, the DCS flow was 185.8 (set point: 189), LONH3 flow was 14.4 (SP:
13.5). Deposition pressure was ~262.
Any comment on the low deposition rate? Thanks a lot.
More information about the tylannitride