From chen0622 at yahoo.com Mon Jul 7 09:29:56 2003 From: chen0622 at yahoo.com (chih-chang) Date: Mon, 7 Jul 2003 09:29:56 -0700 (PDT) Subject: reservation cancelled from 17:30 to 21:30 of July 8th Message-ID: <20030707162956.5195.qmail@web12705.mail.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From wangqian at stanford.edu Mon Jul 7 12:47:15 2003 From: wangqian at stanford.edu (Qian Wang) Date: Mon, 7 Jul 2003 12:47:15 -0700 (PDT) Subject: tlylan nitride Message-ID: Hi I canceled my reservation on Tylannitride from 2 pm to 7 pm. Sorry to notify later. qian From cm_richter at att.net Fri Jul 11 14:22:57 2003 From: cm_richter at att.net (cm_richter at att.net) Date: Fri, 11 Jul 2003 21:22:57 +0000 Subject: Cancelled Reservation Monday (7-14-2003) 9am to 1:30pm Message-ID: From tkato at stanford.edu Mon Jul 14 12:46:27 2003 From: tkato at stanford.edu (Takahisa Kato) Date: Mon, 14 Jul 2003 12:46:27 -0700 Subject: canceled the reservation Jul 15 from 8:30 to 12:30 Message-ID: <006301c34a40$9e10f660$355640ab@TKATO> wafers are not going to be ready by then. I'm sorry so much for late notice. Takahisa From gladys at snf.stanford.edu Tue Jul 15 18:24:34 2003 From: gladys at snf.stanford.edu (Gladys Sarmiento) Date: Tue, 15 Jul 2003 18:24:34 -0700 Subject: LONH378 recipe Message-ID: <3F14A952.6060205@snf.stanford.edu> Tylannitride users: On the LONH378 recipe, a 15 minute extended NH3 flow had been added after the deposition. We hope that this will help reduce the amount of "bubbles" in the film. Please add the extra 15 minutes to the total process time. Gladys -- Gladys Sarmiento Stanford Nanofabrication Facility 420 Via Mall, CIS 145 Stanford, CA 94305-4070 (650) 725-6199 gladys at snf.stanford.edu From c.richter at lgrinc.com Wed Jul 16 11:52:26 2003 From: c.richter at lgrinc.com (Claudia Richter) Date: Wed, 16 Jul 2003 11:52:26 -0700 Subject: reservation cancelled For Thursday 1pm to 6:30pm (7-17-2003) Message-ID: <000001c34bcb$69c8afb0$580aa8c0@Claudia> I will not be able to make it to this reservation time. Claudia -------------- next part -------------- An HTML attachment was scrubbed... URL: From cm_richter at att.net Thu Jul 17 15:32:10 2003 From: cm_richter at att.net (cm_richter at att.net) Date: Thu, 17 Jul 2003 22:32:10 +0000 Subject: Cancelled Reservation For This Friday 1:30pm - 6:30pm Message-ID: will not be able to make it in at this reservation time. From mtang at snf.stanford.edu Mon Jul 21 08:19:01 2003 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 21 Jul 2003 08:19:01 -0700 Subject: Note for tylannitride users? Message-ID: <3F1C0465.47FD9EB1@snf.stanford.edu> Tylannitride users: There have been an increasing number of reports in recent weeks of "particles" and "bubbles" in tylannitride films. It seems that the recent rash first began with a report of gross particles and flakes all over by Claudia Richter on June 24. A small leak was found in the system; the tube was pulled and cleaned as part of the repair. Subsequent users have not seen the gross particles/flakes since then; however, reports of bubbles and small film particles have increased. It's not clear as to whether we're all just more sensitized or if we are experiencing an excursion. Bubbles have been noted in the low stress LONH3 process for quite some time. The problem is intermittent but common. The data has suggested that it was the high DCS to NH3 ratio (much higher than recommended or run anywhere else) was the cause (either residual unreacted DCS causing nucleation or formation of H2 gas leading to pores in the film.) The 850 low stress process (with lower DCS ratio) was developed, in part, to address the bubble problem (although this has turned out not to be the case.) Discussions with Tylan, the Berkeley Microlab, and Sandia, have been interesting. They all say that bubbles are a chronic problem with DCS processes, particularly for high DCS/NH3 ratios and that residual DCS will react with air to create very small particles, which then appear as bubbles when film is deposited. One suggested solution was to simply add 15 minutes of NH3 flow, following deposition, to react any remaining DCS. (This rationale, by the way, should address potential bubbles in the following run, not the one with the extended NH3.) Gladys has done this to the LONH3 run and will be adding it to all other recipes as soon as possible. If you observe bubbles in your films, please let one of us know. The longer term solution involves an equipment modification (used by Berkeley and Sandia) which allows a constant N2 flow in the tube. The furnace guys are working on this right now. Finally, we don't know if what we are experiencing is the same persistent bubble problem we've always had or if this is an excursion. The extended NH3 flow should take care of it if it is the persistent problem, but probably not if it is the excursion problem. Again, please let us know what you observe! Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From tberg at snf.stanford.edu Tue Jul 29 12:10:18 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 29 Jul 2003 12:10:18 -0700 Subject: Tube available Message-ID: <3F26C69A.DB0C963C@snf.stanford.edu> I have removed my reservations. my test is completed.ted From maurice at snf.stanford.edu Thu Jul 31 15:58:46 2003 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Thu, 31 Jul 2003 15:58:46 -0700 Subject: Nitride free ...now...training cancelled Message-ID: <3F299F26.6050204@snf.stanford.edu> -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278