From rcrane at snf.stanford.edu  Mon Mar 10 16:01:37 2003
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Mon, 10 Mar 2003 16:01:37 -0800
Subject: Furnace shut down for  Thermco tie-in
Message-ID: <3E6D2761.C9709463@snf.stanford.edu>

LP furnace users,

Heads up for a future shut down. The good news: The long awaited process
gas tie-in for the Thermco, bank 1 source cabinet is finally upon us.
The bad news: The tie-in and permit required testing will necessitate a
10-14 day shut down of SiGe, Poly, Nitride, BPSG, and Tystar. We will
attempt to reduce this time duration. The earliest start date for the
tie-in would April 7, 2003. The permit issues are still being resolved,
so the actual start time may be later. I will post a definite start date
as soon as it is known. Please starting planning for this shut down.

Furnaces NOT affected by this action: BBr3, POCl3, oxidation
(tylan1-4,7), FGA, and TEOS.

Thanks for your patience,

Dick
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From tberg at snf.stanford.edu  Tue Mar 11 07:52:24 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 11 Mar 2003 07:52:24 -0800
Subject: [Fwd: Lonh378 Problem]
Message-ID: <3E6E0638.7A9B59A5@snf.stanford.edu>


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Subject: Lonh378 Problem
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From cm_richter at att.net  Thu Mar 13 15:59:00 2003
From: cm_richter at att.net (cm_richter at att.net)
Date: Thu, 13 Mar 2003 23:59:00 +0000
Subject: Cancelled Reservation Friday March 14, 2003 9am to 1pm
Message-ID: <mailman.3.1356283756.5030.tylannitride@snf.stanford.edu>




From bchui at california.com  Wed Mar 19 02:03:51 2003
From: bchui at california.com (Benjamin Chui)
Date: Wed, 19 Mar 2003 02:03:51 -0800
Subject: tylannitride free wed 1900-midnight
Message-ID: <web-41829258@california.com>


From rcrane at snf.stanford.edu  Fri Mar 28 17:38:02 2003
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Fri, 28 Mar 2003 17:38:02 -0800
Subject: 4/21 Furnace shutdown for Thermco tie-in
Message-ID: <3E84F8FA.4C28B49A@snf.stanford.edu>

LP furnace users,

The LPCVD furnace shutdown is now on schedule to start at 0600 on
Monday, April 21, with a completion date of Wednesday, April 30. This
action allows final connection of process gases to the Thermco, bank 1
furnace and will affect SiGe, Poly, Nitride, BPSG, and Tystar tubes.
Please plan according.

The permits are now in order, contractors have committed, staff is ready
and county inspectors are being scheduled. The tie-in and permit
required testing should take seven working days. There is a small amount
of buffer time built in to this schedule. The issue of county
inspections is still being resolved and has the highest change of delay.
All work which could be addressed prior to shutdown has been completed.
I will issue progress reports as milestones are completed.

Furnaces NOT affected by this action: BBr3, POCl3, oxidation
(tylan1-4,7), FGA, and TEOS.

Thanks for your patience and understanding. This work represents a major
step toward six inch processing capability.

Dick
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From mdickey at snf.stanford.edu  Mon Mar 31 14:06:32 2003
From: mdickey at snf.stanford.edu (Mike Dickey)
Date: Mon, 31 Mar 2003 14:06:32 -0800
Subject: Pull and clean 
Message-ID: <3E88BBE8.3E4B471F@snf.stanford.edu>

Pull and clean is done. ready for test