From erictao at stanford.edu  Wed Aug  4 13:19:50 2004
From: erictao at stanford.edu (Eric Tao)
Date: Wed, 04 Aug 2004 13:19:50 -0700
Subject: tube free 15:30 to 20:00
Message-ID: <6.0.1.1.2.20040804131910.02631670@erictonn.pobox.stanford.edu>

wafers not ready. -eric



From maurice at snf.stanford.edu  Thu Aug  5 08:36:17 2004
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Thu, 05 Aug 2004 08:36:17 -0700
Subject: nidride; today @ 10:00am, tomorrow @10:00: free
Message-ID: <411253F1.8020809@snf.stanford.edu>

A user has freed up time on nitide today from 10:00am until 1:30pm and
tomorrow(8/6/04) from 10:00am until 2:30pm.

have fun

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




From gladys at snf.stanford.edu  Thu Aug  5 11:44:59 2004
From: gladys at snf.stanford.edu (Gladys Sarmiento)
Date: Thu, 05 Aug 2004 11:44:59 -0700
Subject: Tube is free  2-430pm
Message-ID: <4112802B.5090109@snf.stanford.edu>

Reservation cancelled...it's free 2-430pm today

Gladys

-- 
Gladys Sarmiento
Stanford Nanofabrication Facility
420 Via Mall, CIS 145
Stanford, CA 94305-4070
(650) 725-6199
gladys at snf.stanford.edu




From arvisun at stanford.edu  Tue Aug 31 19:08:42 2004
From: arvisun at stanford.edu (Arvind Sundaramurthy)
Date: Tue, 31 Aug 2004 19:08:42 -0700
Subject: Problem with Tylan Nitride
Message-ID: <1094004522.41352f2a35334@webmail.stanford.edu>

I ran the program LONH378. At step 35(Pump Down and Gross Leak Check) it
checks the process pressure. Since it was above the threshold of 500, it
aborted and went to step 115(Backfill and Abort Step). 

No deposition was done and I suspect any user running another program will
end up with the same error. The furnace is in yellow light mode.

arvind