From maurice at snf.stanford.edu Mon Feb 2 15:46:04 2004 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Mon, 02 Feb 2004 15:46:04 -0800 Subject: dropped wed morning reservation Message-ID: <401EE13C.6080907@snf.stanford.edu> -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From crichter at snf.stanford.edu Thu Feb 5 10:18:47 2004 From: crichter at snf.stanford.edu (crichter) Date: Thu, 05 Feb 2004 18:18:47 +0000 Subject: Tylan Nitride: Reservation Cancelled For Friday 11:30pm to 3:30pm Message-ID: <020520041818.4011.16de@att.net> From Spotworthy at aol.com Thu Feb 12 13:25:22 2004 From: Spotworthy at aol.com (Spotworthy at aol.com) Date: Thu, 12 Feb 2004 16:25:22 -0500 Subject: film thickness non-uniformity Message-ID: <621EC6FB.750BA4C9.0CEC25E7@aol.com> Today I ran 6 device wafers and a test wafer for 30 min of LONH378 (the old low stress nitride program). I put wafers in first boat closest to load, facing away from the tube, flats up. I had 1 furnace dummy in front of my wafers, and 2 furnace dummies behind. I got a very distinctive color variation from the front (load) to the back (source) of my wafers. Also lots of particles near the flat across about half the wafer to very few particles on the side opposite the major flat (which had been loaded down in the boat). target thickness 1000A. I have never seen such a thickness non-uniformity in the nitride tube. Something is up with the tube I suspect. Here is a summation:thickness measurements in angstroms. load wafer # color opposite flat center flat TW Yellow 2538 2594 2655 1 yellow/grn 2204 2214 2307 2 green/blue 2053 2066 2183 3 blue 1964 1884 1974 4 dark blue 1847 1792 1889 5 purple 1767 1700 1795 source 6 dark purple 1709 1631 1725 Linda W. From maurice at snf.stanford.edu Fri Feb 13 14:33:45 2004 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Fri, 13 Feb 2004 14:33:45 -0800 Subject: Hi dep rate LONH378 Message-ID: <402D50C9.2050000@snf.stanford.edu> Hi dep rate LONH378 The tube is up for the weekend. Possible uniformity problem. Use at your own risk. Several users are growing masking layers and are not concerned with uniformity From tberg at snf.stanford.edu Tue Feb 17 14:32:45 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 17 Feb 2004 14:32:45 -0800 Subject: Pump changed Message-ID: <4032968D.5050600@snf.stanford.edu> Hello all the pump has been changted per Mary's request. Base is good leak reate is good. Needs test. From bchui at california.com Wed Feb 18 01:34:21 2004 From: bchui at california.com (Benjamin Chui) Date: Wed, 18 Feb 2004 01:34:21 -0800 Subject: Tylannitride free wed 1300-1900 Message-ID: From okilic at stanford.edu Wed Feb 18 21:09:17 2004 From: okilic at stanford.edu (Onur KILIC) Date: Wed, 18 Feb 2004 21:09:17 -0800 Subject: Tylannitride free Thursday 8am-1pm Message-ID: <1077167357.403444fdb3869@webmail.stanford.edu> Tylannitride free Thursday 8am-1pm -- Onur KILI? PhD Candidate Applied Physics Stanford University, CA http://www.stanford.edu/~okilic From cm_richter at att.net Thu Feb 19 16:50:13 2004 From: cm_richter at att.net (cm_richter at att.net) Date: Fri, 20 Feb 2004 00:50:13 +0000 Subject: Tylan Nitride: Reservation Cancelled for Friday (2/20) 11am to 3pm Message-ID: <022020040050.19926.b6f@att.net> From maurice at snf.stanford.edu Mon Feb 23 10:04:39 2004 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Mon, 23 Feb 2004 10:04:39 -0800 Subject: nitride free from 1-6 today Message-ID: <403A40B7.8020207@snf.stanford.edu> Sorry for the late notice. Trainee's Fed-Ex'ed wafers did not arrive this morning. Tube free from 1:00-6:00pm. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From jenwang at stanford.edu Tue Feb 24 00:41:46 2004 From: jenwang at stanford.edu (Jen-Shiang Wang) Date: Tue, 24 Feb 2004 00:41:46 -0800 Subject: nitride free from 6:30 PM-12 PM today (Feb. 24) In-Reply-To: <403A40B7.8020207@snf.stanford.edu> Message-ID: wafers not ready. From tberg at snf.stanford.edu Tue Feb 24 12:52:44 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 24 Feb 2004 12:52:44 -0800 Subject: WBdiff will be going down on March 11 to install a 6"/4" srd Message-ID: <403BB99C.2050909@snf.stanford.edu> Hello All, WBDIFF will be going down on March 11 for the install of a 2 stack 4"/6" SRD this is another step in the move toward 6" THanks in advance for the help.ted From tberg at snf.stanford.edu Thu Feb 26 08:14:41 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 26 Feb 2004 08:14:41 -0800 Subject: NH3 Cylinder change Message-ID: <403E1B71.1020902@snf.stanford.edu> Hello all, the NH3 cylinder is low and will need to be changed after xiangli's current run. it should be back up tomorrow morning. One user scheduled for this afternoon has been notified. From maurice at snf.stanford.edu Fri Feb 27 14:12:37 2004 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Fri, 27 Feb 2004 14:12:37 -0800 Subject: Test complete Message-ID: <403FC0D5.3090008@snf.stanford.edu> Test complete after NH3 bottle change. Still some particles. System yellow.