From maurice at snf.stanford.edu Wed Jan 7 09:16:36 2004 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Wed, 07 Jan 2004 09:16:36 -0800 Subject: Phos bottle change on 1/12/04 Message-ID: <3FFC3EF4.8050902@snf.stanford.edu> Nitride and Tystar users, The Phosphine bottle is going to be changed monday morning (1/12/04). Both tube can still be used, but only for undoped depositions. Both tubes will show yellow on Coral. We expect that the bottle change will take 24 hours. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From seymour at snf.stanford.edu Fri Jan 9 10:26:11 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 09 Jan 2004 10:26:11 -0800 Subject: removing shutdown Message-ID: <3FFEF242.9A85F7C@snf.stanford.edu> The exhaust problem has been identified and fixed. A test run went through with no exhaust alarms being generated. The tube is up to use. From cm_richter at att.net Thu Jan 15 09:14:22 2004 From: cm_richter at att.net (Claudia Richter) Date: Thu, 15 Jan 2004 09:14:22 -0800 Subject: Tylan Nitride -- Cancelled Reservation Today from 12pm - 4:30pm Message-ID: My wafers will not be ready on time. From tberg at snf.stanford.edu Thu Jan 29 11:22:39 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 29 Jan 2004 11:22:39 -0800 Subject: Issue with soft pump interlock-resolved Message-ID: <40195D7F.8050407@snf.stanford.edu> Hello all, Therte was a problem with the soft pump interlock. i have used a secondary switch closure to resolve the issue and the system is functioning correctly now.ted From masafumi at stanford.edu Thu Jan 29 13:21:12 2004 From: masafumi at stanford.edu (masa) Date: Thu, 29 Jan 2004 13:21:12 -0800 Subject: furnace is free till 6pm In-Reply-To: <40195D7F.8050407@snf.stanford.edu> References: <40195D7F.8050407@snf.stanford.edu> Message-ID: <20040129131953.7EE0.MASAFUMI@stanford.edu> Hi all, Nitride furnace is free till 6pm today. Sorry for late notice. masa From masafumi at stanford.edu Thu Jan 29 16:49:55 2004 From: masafumi at stanford.edu (masa) Date: Thu, 29 Jan 2004 16:49:55 -0800 Subject: Fw: furnace is free tonight Message-ID: <20040129164910.7EE4.MASAFUMI@stanford.edu> Hi all, Nitride furnace is free tonight. Sorry for late notice. masa --------------------- Original Message Ends --------------------