Long LONH378 runs
maurice at snf.stanford.edu
Fri Jun 4 12:43:24 PDT 2004
Please note that the system is yellow lighted. A users attempted a 2um
run twice this week and had an MFS alarm (DCS flow) sometime during
both of 9 hour deposition.
We have not seen this happen with the LONH378 program at shorter times.
We have not seen this happen with any other program.
Our Maint team has put a monitor on DCS mass flow controller and will
let it collect data over the weekend.
If you do choose to run long depositions, it may be a good idea to come
in and check the status of the deposition throughout the run.
And as a reminder: We should be writing MFS alarms in the alarm log
book. If you are not familiar with this log or were to get the info to
fill it out, please contact anyone in the diff staff.
maurice at stanford.edu
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
More information about the tylannitride