From kenney at SLAC.Stanford.EDU Mon Mar 1 15:00:22 2004 From: kenney at SLAC.Stanford.EDU (Chris Kenney) Date: Mon, 01 Mar 2004 15:00:22 -0800 (PST) Subject: Available Monday 18:30-23:00 Message-ID: Problems with Drytek2, so my wafers won't be ready. Chris From kenney at SLAC.Stanford.EDU Tue Mar 2 11:49:00 2004 From: kenney at SLAC.Stanford.EDU (Chris Kenney) Date: Tue, 02 Mar 2004 11:49:00 -0800 (PST) Subject: Free 15:30-18:00 Tuesday Message-ID: Problems with Drytek2, can't get my wafers ready. Sorry for the late notice again. From jenwang at stanford.edu Fri Mar 5 13:29:47 2004 From: jenwang at stanford.edu (Jen-Shiang Wang) Date: Fri, 5 Mar 2004 13:29:47 -0800 Subject: free this evenning (17:30 - 24:00) Message-ID: <1078522187.4048f14bc3d02@webmail> Wafers not ready. From tberg at snf.stanford.edu Mon Mar 8 08:35:02 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 08 Mar 2004 08:35:02 -0800 Subject: WBdiff Down tomorrow for new rinser dryer install Message-ID: <404CA0B6.1090905@snf.stanford.edu> Hello all, Just a reminder wbdiff will be going down tomorrow for the new dual rinser dryer install. It should be up late tomorrow if all goes according to plan. ted From zywang at stanford.edu Tue Mar 9 20:24:14 2004 From: zywang at stanford.edu (Zhengyu Wang) Date: Tue, 9 Mar 2004 20:24:14 -0800 (PST) Subject: 8pm-12pm tonight free Message-ID: Overetched my wafers on P5000 this afternoon, has to cancel tylannitride 8pm-12pm for tonight. Sorry for late notice. From Spotworthy at aol.com Fri Mar 19 09:07:59 2004 From: Spotworthy at aol.com (Spotworthy at aol.com) Date: Fri, 19 Mar 2004 12:07:59 -0500 Subject: wafers left in tube Message-ID: <3BD3454F.0D4B59C4.0CEC25E7@aol.com> I found the nitride tube running pump10 this morning, and when I went to load my wafers, there were already wafers in the tube. I unloaded them into a diffusion boat. Linda W. From seymour at snf.stanford.edu Mon Mar 22 11:38:11 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 22 Mar 2004 11:38:11 -0800 Subject: MFS alarms Message-ID: <405F40A3.54178247@snf.stanford.edu> To Tylan users, When you experience an alarm condition on a tube the front panel will show MFS Alarm. If possible at this time go to the back room and look at the gas jungle controller for that tube and it will show the gas or interlock condition that triggered the alarm mode on the display. Including this information in the coral and the tube alarm status book for each tube will allow maintenance to have a direction to trouble shoot the condition. This is especially important with after hours alarm conditions when maintenance cannot inquire about the triggering event. Thanks for your efforts in providing this information in your coral equipment messages. Ray Seymour Diffusion equipment technician 7247425 From maurice at snf.stanford.edu Wed Mar 24 15:15:41 2004 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Wed, 24 Mar 2004 15:15:41 -0800 Subject: Nitride up Message-ID: <4062169D.2040602@snf.stanford.edu> tube pulled, cleaned, coated and tested. Uniformity good. Very few particles. Nitride2 looks good. From seymour at snf.stanford.edu Fri Mar 26 12:01:33 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 26 Mar 2004 12:01:33 -0800 Subject: leak check completed Message-ID: <40648C1C.6404F53D@snf.stanford.edu> Tube is up to run