From xiajing at stanford.edu  Wed Sep  1 01:07:50 2004
From: xiajing at stanford.edu (Jing Xia)
Date: Wed,  1 Sep 2004 01:07:50 -0700
Subject: same problem as arvind's
Message-ID: <1094026070.413583566b87c@webmail.stanford.edu>

I tried lonh387 and nitride2 and had the same leak check problem. 
Nither of them worked. They both jumped directly from 35 to 115/110. 



From maurice at snf.stanford.edu  Wed Sep  8 13:39:09 2004
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Wed, 08 Sep 2004 13:39:09 -0700
Subject: 1:30 res cancelled:nitride free today
Message-ID: <413F6DED.5090008@snf.stanford.edu>





From curlwang at stanford.edu  Tue Sep 21 18:05:04 2004
From: curlwang at stanford.edu (Ke Wang)
Date: Tue, 21 Sep 2004 18:05:04 -0700 (PDT)
Subject: tylannitride
Message-ID: <Pine.GSO.4.44.0409211758260.9869-100000@elaine27.Stanford.EDU>

Hello dear tylannitride users,

I saw reports from fengj on the maintenance page that large number of
particles were found in all of his recent depositions. I'm wondering if
other people are experiencing the same problem these days? I have a run on
Thursday which is kind of important to me, and I really don't want to mess
up. So if you have taken a look of your film under microscope, or willing
to bother to do so, please, please let me (us) know how it looks like.

Maurice, any comment on this?

Thanks a lot!!

Ke


_____________________________________________
Ke Wang
PHD Candidate
Department of Applied Physics, Stanford University

CISX B113-14
Stanford, CA 94305-4070

Phone: (650)723-8040



From maurice at snf.stanford.edu  Tue Sep 21 18:12:34 2004
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Tue, 21 Sep 2004 18:12:34 -0700
Subject: tylannitride
In-Reply-To: <Pine.GSO.4.44.0409211758260.9869-100000@elaine27.Stanford.EDU>
References: <Pine.GSO.4.44.0409211758260.9869-100000@elaine27.Stanford.EDU>
Message-ID: <4150D182.7010302@snf.stanford.edu>

I have a training tomorrow afternoon and we will see if it is still a 
problem.  I plan on running Nitride2.  I'll keep you all updated.

-m

Ke Wang wrote:

>Hello dear tylannitride users,
>
>I saw reports from fengj on the maintenance page that large number of
>particles were found in all of his recent depositions. I'm wondering if
>other people are experiencing the same problem these days? I have a run on
>Thursday which is kind of important to me, and I really don't want to mess
>up. So if you have taken a look of your film under microscope, or willing
>to bother to do so, please, please let me (us) know how it looks like.
>
>Maurice, any comment on this?
>
>Thanks a lot!!
>
>Ke
>
>
>_____________________________________________
>Ke Wang
>PHD Candidate
>Department of Applied Physics, Stanford University
>
>CISX B113-14
>Stanford, CA 94305-4070
>
>Phone: (650)723-8040
>  
>

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




From erhan.ata at gmems.com  Tue Sep 21 23:55:44 2004
From: erhan.ata at gmems.com (Erhan Ata)
Date: Tue, 21 Sep 2004 23:55:44 -0700 (PDT)
Subject: tylannitride
In-Reply-To: <4150D182.7010302@snf.stanford.edu>
Message-ID: <20040922065544.18318.qmail@web61105.mail.yahoo.com>

I did a low stress run (NEWLSN). and film seems OK
under microscope (either bright and dark fields), with
occasional spots which may be due to my mishandling
during tranport.

Erhan
--- Maurice Stevens <maurice at snf.stanford.edu> wrote:

> I have a training tomorrow afternoon and we will see
> if it is still a 
> problem.  I plan on running Nitride2.  I'll keep you
> all updated.
> 
> -m
> 
> Ke Wang wrote:
> 
> >Hello dear tylannitride users,
> >
> >I saw reports from fengj on the maintenance page
> that large number of
> >particles were found in all of his recent
> depositions. I'm wondering if
> >other people are experiencing the same problem
> these days? I have a run on
> >Thursday which is kind of important to me, and I
> really don't want to mess
> >up. So if you have taken a look of your film under
> microscope, or willing
> >to bother to do so, please, please let me (us) know
> how it looks like.
> >
> >Maurice, any comment on this?
> >
> >Thanks a lot!!
> >
> >Ke
> >
> >
> >_____________________________________________
> >Ke Wang
> >PHD Candidate
> >Department of Applied Physics, Stanford University
> >
> >CISX B113-14
> >Stanford, CA 94305-4070
> >
> >Phone: (650)723-8040
> >  
> >
> 
> -- 
> maurice at stanford.edu
> 
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA  94305
> P. (650)725-3660
> F. (650)725.6278
> 
> 
> 


=====



From xiajing at stanford.edu  Wed Sep 22 02:36:53 2004
From: xiajing at stanford.edu (Jing Xia)
Date: Wed, 22 Sep 2004 02:36:53 -0700
Subject: tylannitride
In-Reply-To: <Pine.GSO.4.44.0409211758260.9869-100000@elaine27.Stanford.EDU>
Message-ID: <000a01c4a087$b1c67920$14880c80@JINGLAPTOP>

HI, 
I did a lonh378 run tonight. The result seems to be ok, no particles
found under microscope. 

Jing

> -----Original Message-----
> From: Ke Wang [mailto:curlwang at stanford.edu] 
> Sent: Tuesday, September 21, 2004 6:05 PM
> To: tylannitride at snf.stanford.edu
> Subject: tylannitride
> 
> 
> Hello dear tylannitride users,
> 
> I saw reports from fengj on the maintenance page that large 
> number of particles were found in all of his recent 
> depositions. I'm wondering if other people are experiencing 
> the same problem these days? I have a run on Thursday which 
> is kind of important to me, and I really don't want to mess 
> up. So if you have taken a look of your film under 
> microscope, or willing to bother to do so, please, please let 
> me (us) know how it looks like.
> 
> Maurice, any comment on this?
> 
> Thanks a lot!!
> 
> Ke
> 
> 
> _____________________________________________
> Ke Wang
> PHD Candidate
> Department of Applied Physics, Stanford University
> 
> CISX B113-14
> Stanford, CA 94305-4070
> 
> Phone: (650)723-8040
> 



From ami at appnano.com  Wed Sep 22 07:18:13 2004
From: ami at appnano.com (Ami Chand)
Date: Wed, 22 Sep 2004 07:18:13 -0700
Subject: tylannitride
In-Reply-To: <Pine.GSO.4.44.0409211758260.9869-100000@elaine27.Stanford.EDU>
Message-ID: <000501c4a0ae$fee969c0$c700a8c0@achand>

I ran  NEWLSN 1000A. There were no particles. 

ami

-----Original Message-----
From: Ke Wang [mailto:curlwang at stanford.edu] 
Sent: Tuesday, September 21, 2004 6:05 PM
To: tylannitride at snf.stanford.edu
Subject: tylannitride


Hello dear tylannitride users,

I saw reports from fengj on the maintenance page that large number of
particles were found in all of his recent depositions. I'm wondering if
other people are experiencing the same problem these days? I have a run
on Thursday which is kind of important to me, and I really don't want to
mess up. So if you have taken a look of your film under microscope, or
willing to bother to do so, please, please let me (us) know how it looks
like.

Maurice, any comment on this?

Thanks a lot!!

Ke


_____________________________________________
Ke Wang
PHD Candidate
Department of Applied Physics, Stanford University

CISX B113-14
Stanford, CA 94305-4070

Phone: (650)723-8040




From ychliu at stanford.edu  Wed Sep 22 08:57:21 2004
From: ychliu at stanford.edu (Yaocheng Liu)
Date: Wed, 22 Sep 2004 08:57:21 -0700
Subject: tylannitride
In-Reply-To: <000501c4a0ae$fee969c0$c700a8c0@achand>
Message-ID: <LAEOLNOLEKJFBJDBECNDCEDOCBAA.ychliu@stanford.edu>

Thanks for the update.

It would be great if there were no particles as reported by the last three
users. Here I would like to clarify the method we usually use to detect the
particles.

With an optical microscope, we first have to make a good focus on the wafer
surface, then switch to dark field and MAXIMIZE the lamp intensity of the
microscope. If there are particles, we'll see "stars in the sky". The method
is very easy but you would not be able to see the particles (even if they
exist) if you don't do a good focus or don't maximize the lamp intensity.

We actually found the particle problem with tylannitride about two years
ago. A lot of efforts have been put there to solve this problem. I'm not
sure if a permanent solution has been found.

Yaocheng

-----Original Message-----
From: Ami Chand [mailto:ami at appnano.com]
Sent: Wednesday, September 22, 2004 7:18 AM
To: 'Ke Wang'; tylannitride at snf.stanford.edu
Subject: RE: tylannitride


I ran  NEWLSN 1000A. There were no particles.

ami

-----Original Message-----
From: Ke Wang [mailto:curlwang at stanford.edu]
Sent: Tuesday, September 21, 2004 6:05 PM
To: tylannitride at snf.stanford.edu
Subject: tylannitride


Hello dear tylannitride users,

I saw reports from fengj on the maintenance page that large number of
particles were found in all of his recent depositions. I'm wondering if
other people are experiencing the same problem these days? I have a run
on Thursday which is kind of important to me, and I really don't want to
mess up. So if you have taken a look of your film under microscope, or
willing to bother to do so, please, please let me (us) know how it looks
like.

Maurice, any comment on this?

Thanks a lot!!

Ke


_____________________________________________
Ke Wang
PHD Candidate
Department of Applied Physics, Stanford University

CISX B113-14
Stanford, CA 94305-4070

Phone: (650)723-8040




From cm_richter at att.net  Wed Sep 22 11:13:13 2004
From: cm_richter at att.net (cm_richter at att.net)
Date: Wed, 22 Sep 2004 18:13:13 +0000
Subject: tylannitride
Message-ID: <092220041813.235.4151C0B8000E1F28000000EB21602806519D0A9B080C079DA1030C@att.net>

I use the same method that Yahocheng uses to detect particles for nitride film inspection. I have had the same experience as Ke's in the past year or so where I have seen a number of particles non-uniformly distributed on the wafer surface using a microscope with dark field. I used the NEWLSN and LONH378 recipes. 

Claudia



-------------- Original message from "Yaocheng Liu" : -------------- 

> Thanks for the update. 
> 
> It would be great if there were no particles as reported by the last three 
> users. Here I would like to clarify the method we usually use to detect the 
> particles. 
> 
> With an optical microscope, we first have to make a good focus on the wafer 
> surface, then switch to dark field and MAXIMIZE the lamp intensity of the 
> microscope. If there are particles, we'll see "stars in the sky". The method 
> is very easy but you would not be able to see the particles (even if they 
> exist) if you don't do a good focus or don't maximize the lamp intensity. 
> 
> We actually found the particle problem with tylannitride about two years 
> ago. A lot of efforts have been put there to solve this problem. I'm not 
> sure if a permanent solution has been found. 
> 
> Yaocheng 
> 
> -----Original Message----- 
> From: Ami Chand [mailto:ami at appnano.com] 
> Sent: Wednesday, September 22, 2004 7:18 AM 
> To: 'Ke Wang'; tylannitride at snf.stanford.edu 
> Subject: RE: tylannitride 
> 
> 
> I ran NEWLSN 1000A. There were no particles. 
> 
> ami 
> 
> -----Original Message----- 
> From: Ke Wang [mailto:curlwang at stanford.edu] 
> Sent: Tuesday, September 21, 2004 6:05 PM 
> To: tylannitride at snf.stanford.edu 
> Subject: tylannitride 
> 
> 
> Hello dear tylannitride users, 
> 
> I saw reports from fengj on the maintenance page that large number of 
> particles were found in all of his recent depositions. I'm wondering if 
> other people are experiencing the same problem these days? I have a run 
> on Thursday which is kind of important to me, and I really don't want to 
> mess up. So if you have taken a look of your film under microscope, or 
> willing to bother to do so, please, please let me (us) know how it looks 
> like. 
> 
> Maurice, any comment on this? 
> 
> Thanks a lot!! 
> 
> Ke 
> 
> 
> _____________________________________________ 
> Ke Wang 
> PHD Candidate 
> Department of Applied Physics, Stanford University 
> 
> CISX B113-14 
> Stanford, CA 94305-4070 
> 
> Phone: (650)723-8040 
> 
> 
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/tylannitride/attachments/20040922/6373ed4f/attachment.html>

From ami at appnano.com  Wed Sep 22 11:28:55 2004
From: ami at appnano.com (Ami Chand)
Date: Wed, 22 Sep 2004 11:28:55 -0700
Subject: Low stress nitride characteristrics
In-Reply-To: <LAEOLNOLEKJFBJDBECNDCEDOCBAA.ychliu@stanford.edu>
Message-ID: <000001c4a0d2$04f1fa80$c004fea9@achand>

Greetings,

Does anyone know what happens to the low stress nitride if annealed at
1100 C ? Does it remain low stress or not?

Any reference or input will be greatly appreciated.

Thanks,

ami



From maurice at snf.stanford.edu  Mon Sep 27 11:57:36 2004
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Mon, 27 Sep 2004 11:57:36 -0700
Subject: Thick depositions
Message-ID: <415862A0.1090100@snf.stanford.edu>

If you plan on doing deposition over 1um, please let someone on the 
diffusion staff know.  We need to make sure that it falls right before a 
burnbox clean and that other users are not also doing long runs.

Over 4 microns was deposited yesterday.  The burnbox had a positive 
pressure when it was inspected this morning.  This is considered a 
safety issue. 

Failure to notify staff before a long deposition may indicate that a 
labusers needs retraining.

-m





From maurice at snf.stanford.edu  Thu Sep 30 14:43:30 2004
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Thu, 30 Sep 2004 14:43:30 -0700
Subject: Nitride results
Message-ID: <415C7E02.9@snf.stanford.edu>

pulled and cleaned.
Uniformity and growthrate good.
Bad Particles