ami at appnano.com
Wed Sep 22 07:18:13 PDT 2004
I ran NEWLSN 1000A. There were no particles.
From: Ke Wang [mailto:curlwang at stanford.edu]
Sent: Tuesday, September 21, 2004 6:05 PM
To: tylannitride at snf.stanford.edu
Hello dear tylannitride users,
I saw reports from fengj on the maintenance page that large number of
particles were found in all of his recent depositions. I'm wondering if
other people are experiencing the same problem these days? I have a run
on Thursday which is kind of important to me, and I really don't want to
mess up. So if you have taken a look of your film under microscope, or
willing to bother to do so, please, please let me (us) know how it looks
Maurice, any comment on this?
Thanks a lot!!
Department of Applied Physics, Stanford University
Stanford, CA 94305-4070
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