From robinhmb at yahoo.com  Mon Apr 25 13:09:54 2005
From: robinhmb at yahoo.com (Robin King)
Date: Mon, 25 Apr 2005 13:09:54 -0700 (PDT)
Subject: Looking for a few good nitride samples
Message-ID: <20050425200954.89641.qmail@web54707.mail.yahoo.com>

Hi all,

Rather than tie up the LPCVD nitride just to create test samples, I
was hoping someone might have a few NITRIDE2 wafers to donate, trade,
etc.  We're checking etch rates in various lab equipment.  

thanks very much,
Robin King, IBM

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From robinhmb at yahoo.com  Wed Apr 27 13:38:25 2005
From: robinhmb at yahoo.com (Robin King)
Date: Wed, 27 Apr 2005 13:38:25 -0700 (PDT)
Subject: Particles
Message-ID: <20050427203826.9062.qmail@web54706.mail.yahoo.com>


I think the tube needs to be cleaned.  I reported large particles on
the sled but it's also showing up as many many small particles on the
wafer under dark field. Another user and I compared films and it's
getting much worse.  FYI.

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