From yeh at alcestech.com Tue Jun 17 16:26:37 2008 From: yeh at alcestech.com (Richard Yeh) Date: Tue, 17 Jun 2008 16:26:37 -0700 Subject: 6/17 1630-2030 tylannitride res canceled Message-ID: <4858482D.8030707@alcestech.com> From mmlee at stanford.edu Wed Jun 18 22:19:57 2008 From: mmlee at stanford.edu (Meredith M. Lee) Date: Wed, 18 Jun 2008 22:19:57 -0700 Subject: Question for tylannitride community Message-ID: <9fa245520806182219t74ff7607od1105f491de59b69@mail.gmail.com> Hi tylannitride users, I was wondering if anyone has any experience with the following or is interested -- if so, I would really appreciate comparing notes and any advice. My target nitride thickness = 2500 A, only 1 side really needed; 4-inch-diameter substrate thicknesses vary from 1.3mm to 6mm (0.25 inches): (1) depositing on quartz (any difference in nitride deposition rate -using LONH378, NITRIDE2, or NEWLSN- seen compared to silicon?) (2) depositing on one side only (placing a dummy in contact with one side) (3) depositing on thick wafers (4) depositing on wafers that do not fit in the slots - specifically, orienting the substrate parallel to the floor instead of perpendicular, with or without a dummy contacting the bottom side Thanks very much! -Meredith -- -------------------------------------------------- Meredith M. Lee Stanford University Ph.D. Candidate, Dept. of Electrical Engineering President, Stanford Student OSA/SPIE Center for Integrated Systems 420 Via Ortega, Stanford, CA 94305-4075 Fax: (650) 723-4659 mmlee at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From christopher.holland at sri.com Wed Jun 25 11:45:21 2008 From: christopher.holland at sri.com (Chris Holland) Date: Wed, 25 Jun 2008 11:45:21 -0700 Subject: Breakdown strength of Low Stress Nitride Message-ID: <48629241.9020607@sri.com> I was wondering whether anyone has characterized the breakdown strength of nitrides grown in the Tylan, either stoichiometric or low stress. Thanks, Chris -- ################################# Christopher Holland Senior Program Manager Microsystems Innovation Laboratory SRI International Menlo Park, CA 94025 650-859-6382 (Phone) 650-859-3090 (fax) www.sri.com/microsys #################################