Breakdown strength of Low Stress Nitride

Chris Holland christopher.holland at sri.com
Wed Jun 25 11:45:21 PDT 2008


I was wondering whether anyone has characterized the breakdown strength 
of nitrides grown in the Tylan, either stoichiometric or low stress.

Thanks, Chris

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Christopher Holland
Senior Program Manager
Microsystems Innovation Laboratory
SRI International
Menlo Park, CA 94025
650-859-6382 (Phone)
650-859-3090 (fax)
www.sri.com/microsys
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