From bahlg at stanford.edu Fri Jul 24 09:49:45 2009 From: bahlg at stanford.edu (Gaurav Bahl) Date: Fri, 24 Jul 2009 09:49:45 -0700 Subject: Reservation removed 10am - 2pm today. Message-ID: <4A69E629.3040408@stanford.edu> Sorry for the late notice. -- Gaurav Bahl PhD Candidate Stanford Micro Structures and Sensors Lab (Kenny Group) Stanford University, California, USA From bahlg at stanford.edu Fri Jul 24 22:43:09 2009 From: bahlg at stanford.edu (Gaurav Bahl) Date: Fri, 24 Jul 2009 22:43:09 -0700 Subject: Reservation removed : 9am-1pm saturday 25/7 Message-ID: <4A6A9B6D.5080506@stanford.edu> -- Gaurav Bahl PhD Candidate Stanford Micro Structures and Sensors Lab (Kenny Group) Stanford University, California, USA From ytcheng at stanford.edu Sun Jul 26 13:49:47 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Sun, 26 Jul 2009 13:49:47 -0700 (PDT) Subject: tylannitride free 9am-1pm tomorrow Message-ID: <567892557.2480461248641387192.JavaMail.root@zm06.stanford.edu> Sample won't be ready. From kevhuang at stanford.edu Sun Jul 26 16:43:45 2009 From: kevhuang at stanford.edu (Kevin T Huang) Date: Sun, 26 Jul 2009 16:43:45 -0700 (PDT) Subject: nitride adhesion to silicon Message-ID: <1139564280.2228851248651825172.JavaMail.root@zm07.stanford.edu> Hi, Could anyone please share some info on the adhesion of nitride to silicon? I had 500nm of nitride on silicon deposited using the NLS recipe and it seems that it peels off from silicon in 10%HF and 1% H2O2 solution after about 40min. at room temperature. Is there a difference in the nitrides' adhesion between low-stress or high stress films? Thanks. Kevin From ytcheng at stanford.edu Tue Jul 28 09:48:35 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Tue, 28 Jul 2009 09:48:35 -0700 Subject: tylannitride reservation this afternoon released In-Reply-To: <804981.99972.qm@web56803.mail.re3.yahoo.com> References: <804981.99972.qm@web56803.mail.re3.yahoo.com> Message-ID: <000b01ca0fa3$3f8f9220$beaeb660$@edu> Sample is not ready -------------- next part -------------- An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Tue Jul 28 22:02:33 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Tue, 28 Jul 2009 22:02:33 -0700 Subject: tylannitride reservation released 3-7pm Thursday and 10am-2pm Friday Message-ID: <000301ca1009$c890bfc0$59b23f40$@edu> Plan changes. -------------- next part -------------- An HTML attachment was scrubbed... URL: