From chen0622 at yahoo.com Tue Jun 2 08:00:25 2009 From: chen0622 at yahoo.com (c.c.) Date: Tue, 2 Jun 2009 08:00:25 -0700 (PDT) Subject: reservation released 10:30 AM to 2:30 PM today Message-ID: <970921.16559.qm@web56806.mail.re3.yahoo.com> The tool of previous process tool is not available.? -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri Jun 26 16:34:18 2009 From: maurice at stanford.edu (maurice stevens) Date: Fri, 26 Jun 2009 16:34:18 -0700 Subject: Burnbox input manifold at high pressure Message-ID: <4A455AFA.5080104@stanford.edu> (sorry if you are getting this from multiple machines or if you are one of the 4 users with tylan LPCVD reservations for this weekend) The following tubes will be down for the weekend: tylanBPSG, tylanpoly, tylannitride, tylanSiGe and teos2. The Tylan LPCVD burnbox input manifold (the Menorah) is at a positive pressure. There is gas trapped between pumps and the burnbox. We will let it purge over the weekend and safely clean it out we we are fully staffed on Monday morning. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278