From ahryciw at stanford.edu Thu May 7 16:17:21 2009 From: ahryciw at stanford.edu (Aaron Hryciw) Date: Thu, 7 May 2009 16:17:21 -0700 Subject: Nitride on pieces for diffusion barrier? Message-ID: <4d36fb940905071617m3924709emf744799e6dc0b27a@mail.gmail.com> Does anyone have experience depositing LPCVD nitride on small (~cm^2 or smaller) pieces in tylannitride to serve as a barrier layer before a dopant diffusion step in tylan5 or 6? Any advice regarding uniformity, required thickness, or tricks would be greaty appreciated! Cheers! - Aaron -- Dr. Aaron Hryciw Postdoctoral Scholar Geballe Laboratory for Advanced Materials Stanford University 476 Lomita Mall (04-490) McCullough Building, Rm. 325 Stanford, CA 94305-4045 Tel.: (650) 723-5840 Fax.: (650) 736-1984 -------------- next part -------------- An HTML attachment was scrubbed... URL: From chen0622 at yahoo.com Mon May 18 08:41:49 2009 From: chen0622 at yahoo.com (c.c.) Date: Mon, 18 May 2009 08:41:49 -0700 (PDT) Subject: tylannitride Tue. (May. 19) reservation released. Message-ID: <804981.99972.qm@web56803.mail.re3.yahoo.com> An HTML attachment was scrubbed... URL: