From kevhuang at stanford.edu  Tue Feb  2 18:45:39 2010
From: kevhuang at stanford.edu (Kevin Huang)
Date: Tue, 2 Feb 2010 18:45:39 -0800
Subject: single-side nitride deposition
Message-ID: <93586f8c1002021845ne2ac3c6ud0c1a00c1285f30b@mail.gmail.com>

Hi,
       Could someone please let me know if there is a way to deposit nitride
on one side only.  I know I can coat on both sides and etch one side in
P5000 but I was wondering if I can put a dummy wafer with my wafer in the
same wafer slot during the deposition so that only one side gets nitride
coating?  Will this cause the wafer to be stuck in the boat?

Thanks.

Kevin
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