single-side nitride deposition
kevhuang at stanford.edu
Tue Feb 2 18:45:39 PST 2010
Could someone please let me know if there is a way to deposit nitride
on one side only. I know I can coat on both sides and etch one side in
P5000 but I was wondering if I can put a dummy wafer with my wafer in the
same wafer slot during the deposition so that only one side gets nitride
coating? Will this cause the wafer to be stuck in the boat?
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