From haemmerl at stanford.edu  Fri Jun 22 11:08:57 2012
From: haemmerl at stanford.edu (Alexandre Haemmerli)
Date: Fri, 22 Jun 2012 11:08:57 -0700
Subject: Young's modulus of low stress nitride NEWLSN
Message-ID: <D2A68C67-E558-44E4-B056-A50208643043@stanford.edu>

Hi nitride lovers,

I was wondering if anybody carried out young's modulus measurements of low stress nitride deposited with NEWLSN.

That would be great if you could share the results.

Thanks,

Alex
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Alexandre Haemmerli
Ph.D. Candidate
Mechanical Engineering
Stanford University
(650) 353-8041
microsystems.stanford.edu