Young's modulus of low stress nitride NEWLSN

Alexandre Haemmerli haemmerl at stanford.edu
Fri Jun 22 11:08:57 PDT 2012


Hi nitride lovers,

I was wondering if anybody carried out young's modulus measurements of low stress nitride deposited with NEWLSN.

That would be great if you could share the results.

Thanks,

Alex
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Alexandre Haemmerli
Ph.D. Candidate
Mechanical Engineering
Stanford University
(650) 353-8041
microsystems.stanford.edu










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