Young's modulus of low stress nitride NEWLSN

Alexandre Haemmerli haemmerl at
Fri Jun 22 11:08:57 PDT 2012

Hi nitride lovers,

I was wondering if anybody carried out young's modulus measurements of low stress nitride deposited with NEWLSN.

That would be great if you could share the results.


Alexandre Haemmerli
Ph.D. Candidate
Mechanical Engineering
Stanford University
(650) 353-8041

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