From maurice at stanford.edu Thu May 31 08:50:17 2012 From: maurice at stanford.edu (maurice stevens) Date: Thu, 31 May 2012 08:50:17 -0700 Subject: TylanNitride interlocks installed Message-ID: <4FC79339.3090808@stanford.edu> Good Morning TylanNitride users, The new Burnbox interlock is now installed. A Coral interlock was also added. Recipes now have an abort hold step: If burnbox fails or if coral is disabled during a step with process gases, the recipe will abort, turn off process gases, N2 purge and then hold for user. User must press Alarm Ack to vent tube. The following recipes are on the new disk: PUMP10 NEWLSN LONH378 NITRIDE2 If other recipes are needed or if you have questions about the new interlocks then please contact me or Ted. -m