From tberg at snf.stanford.edu Mon Dec 2 06:39:26 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Dec 2, 2002 6:39:26 AM Subject: Shutdown tylanpoly 2002-12-02 06:39:25: Pull and Clean on Poly Message-ID: System is at target thickness for pull and clean From mdickey at snf.stanford.edu Mon Dec 2 01:56:35 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Dec 2, 2002 1:56:35 PM Subject: Comment tylanpoly 2002-12-02 13:56:34: Pull and clean done Message-ID: Pull and clean is done. Currently running a coat recipe. When done it will need a test. From maurice at snf.stanford.edu Mon Dec 2 05:31:47 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Dec 2, 2002 5:31:47 PM Subject: Shutdown tylanpoly 2002-12-02 06:39:25: Pull and Clean on Poly/Green light Message-ID: Wafer uniformity 1.3% or better From maurice at snf.stanford.edu Mon Dec 2 05:34:20 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Dec 2, 2002 5:34:20 PM Subject: Problem tylanpoly 2002-11-30 20:31:10: Uniformity is not good/ okay now Message-ID: Uniformity test run after tube was pulled and cleaned looks good. 1.3% or better From lindaw at snf.stanford.edu Tue Dec 3 04:24:59 2002 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Dec 3, 2002 4:24:59 PM Subject: Shutdown tylanpoly 2002-12-03 16:24:59: tube won't close completely, htting a hard stop Message-ID: Dick checked the drive pully and rails, and there doesn't seem to be anything wrong with the drive mechanism. Suspect some kind of blockage in the tube. From maurice at snf.stanford.edu Tue Dec 3 05:00:41 2002 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Dec 3, 2002 5:00:41 PM Subject: Shutdown tylanpoly 2002-12-03 16:24:59: tube won't close completely, htting a hard stop Message-ID: Removed burr from track channel