From kailash at snf.stanford.edu  Thu Jan 17 07:13:28 2002
From: kailash at snf.stanford.edu (kailash at snf.stanford.edu)
Date: Jan 17, 2002 7:13:28 PM
Subject: Shutdown tylanpoly 2002-01-17 19:13:26: poly tube problems
Message-ID: <mailman.84.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>

Hi,
      I ran POLYEMIT and the boat doesnt seem to be coming off. It ran through the entire program but at the last step the boat still seems to be stuck and it kept beeping a MFS alarm. It didnt help to simply acknowledge the alarm nor did a manual boat out work (after aborting the program). My wafers are still in there. Grupp and Liji asked me to run polypump and i have reported the shutdown after running polypump. Incidentally during the polyemit program there was a MFS alarm on N2 flow.  Please let me know as soon as it is fixed because my wafers are still in there.
       Thanks,
        - Kailash 



From seymour at snf.stanford.edu  Fri Jan 18 08:01:35 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jan 18, 2002 8:01:35 AM
Subject: Shutdown tylanpoly 2002-01-18 08:01:34: doing pull and clean
Message-ID: <mailman.85.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Jan 18 03:17:21 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jan 18, 2002 3:17:21 PM
Subject: Shutdown tylanpoly 2002-01-17 19:13:26: poly tube problems
Message-ID: <mailman.86.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>

adjusted N2 purge zero and did auto zero routine on the mfs460.



From seymour at snf.stanford.edu  Fri Jan 18 03:17:40 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jan 18, 2002 3:17:40 PM
Subject: Shutdown tylanpoly 2002-01-18 08:01:34: doing pull and clean
Message-ID: <mailman.87.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>

pull and clean completed. 



From seymour at snf.stanford.edu  Fri Jan 18 03:18:02 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jan 18, 2002 3:18:02 PM
Subject: Shutdown tylanpoly 2002-01-18 15:18:01: needs testing after pull and clean
Message-ID: <mailman.88.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>




From gladys at snf.stanford.edu  Tue Jan 22 03:13:03 2002
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Jan 22, 2002 3:13:03 PM
Subject: Shutdown tylanpoly 2002-01-18 15:18:01: needs testing after pull and clean..testrun completed
Message-ID: <mailman.89.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>

testrun completed.



From seymour at snf.stanford.edu  Tue Jan 22 03:47:20 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jan 22, 2002 3:47:20 PM
Subject: Shutdown tylanpoly 2002-01-22 15:47:18: tube has high leak rate
Message-ID: <mailman.90.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Wed Jan 23 10:14:11 2002
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Jan 23, 2002 10:14:11 AM
Subject: Shutdown tylanpoly 2002-01-22 15:47:18: tube has high leak rate
Message-ID: <mailman.91.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>

Made a tube adjustment, leak test good...ready for use