Problem tylanpoly 2002-07-04 11:15:01: The Tube might havebeen contaminated by glass

eadens at snf.stanford.edu eadens at snf.stanford.edu
Thu Jul 4 11:15:02 PDT 2002


I mistaken glass wafers as quortz and ran a poly Si deposition in the furnace on Tuesday.  The tube might be contaminated by glass.




More information about the tylanpoly-pcs mailing list