Problem tylanpoly 2002-07-04 11:15:01: The Tube might havebeen contaminated by glass
eadens at snf.stanford.edu
eadens at snf.stanford.edu
Thu Jul 4 11:15:02 PDT 2002
I mistaken glass wafers as quortz and ran a poly Si deposition in the furnace on Tuesday. The tube might be contaminated by glass.
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