From seymour at snf.stanford.edu Mon Mar 4 07:55:00 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 4, 2002 7:55:00 AM Subject: Shutdown tylanpoly 2002-03-04 07:54:59: down for pull and clean Message-ID: From gladys at snf.stanford.edu Wed Mar 6 04:51:07 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mar 6, 2002 4:51:07 PM Subject: Shutdown tylanpoly 2002-03-04 07:54:59: down for pull and clean: : testrun completed Message-ID: From seymour at snf.stanford.edu Mon Mar 11 08:47:56 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 11, 2002 8:47:56 AM Subject: Shutdown tylanpoly 2002-03-11 08:47:56: silane cylinder changed under leakcheck Message-ID: From tberg at snf.stanford.edu Tue Mar 12 10:51:29 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 12, 2002 10:51:29 AM Subject: Shutdown tylanpoly 2002-03-11 08:47:56: silane cylinder changed under leakcheck Message-ID: Cylinder changed leak check passed From tberg at snf.stanford.edu Tue Mar 19 06:31:25 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 19, 2002 6:31:25 AM Subject: Shutdown tylanpoly 2002-03-19 06:31:25: Shut down today for gas line redo Message-ID: Gas line redo From tberg at snf.stanford.edu Tue Mar 19 03:01:56 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mar 19, 2002 3:01:56 PM Subject: Shutdown tylanpoly 2002-03-19 06:31:25: Shut down today for gas line redo Message-ID: Gas line work completed From ejwong at snf.stanford.edu Thu Mar 21 09:07:31 2002 From: ejwong at snf.stanford.edu (ejwong at snf.stanford.edu) Date: Mar 21, 2002 9:07:31 AM Subject: Problem tylanpoly 2002-03-21 09:07:30: 3/21: metal and nonmetal vacuum wands switched when I came to use tylannitride this morning. I have no idea when they were switched and/or if the tubes are contaminated. Message-ID: 3/21: metal and nonmetal vacuum wands switched when I came to use tylannitride this morning. I have no idea when they were switched and/or if the tubes are contaminated. From latta at snf.stanford.edu Wed Mar 27 11:34:56 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Mar 27, 2002 11:34:56 AM Subject: Problem tylanpoly 2002-03-21 09:07:30: 3/21: metal and nonmetal vacuum wands switched when I came to use tylannitride this morning. I have no idea when they were switched and/or if the tubes are contaminated. Message-ID: Wand cleaned From evelyn at snf.stanford.edu Wed Mar 27 04:33:55 2002 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: Mar 27, 2002 4:33:55 PM Subject: Problem tylanpoly 2002-03-27 16:33:54: not uniform Message-ID: The 1st approx. 12 wafers (polyemit) towards the front of the tube came out uniform; the dummy was in the middle and it was uniform. All the rest of the wafers towards the end of the tube had hardly any polyemit and the last wafer was rainbow.