From gladys at snf.stanford.edu  Wed May  1 11:08:40 2002
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: May 1, 2002 11:08:40 AM
Subject: Shutdown tylanpoly 2002-04-30 07:58:01: Pull and clean: testrun completed, ok to use
Message-ID: <mailman.103.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>




From ychliu at snf.stanford.edu  Thu May  2 12:32:26 2002
From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu)
Date: May 2, 2002 12:32:26 PM
Subject: Shutdown tylanpoly 2002-05-02 12:32:25: Base pressure too high (1515)
Message-ID: <mailman.104.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Thu May  2 01:51:01 2002
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: May 2, 2002 1:51:01 PM
Subject: Shutdown tylanpoly 2002-05-02 12:32:25: Base pressure too high (1515)
Message-ID: <mailman.105.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>

End baffle came off, put it back on and vacuumed up broken
wafer pieces. Leak checked and adjusted cantilever. Ready
for use



From mcconnel at snf.stanford.edu  Sun May 12 10:31:39 2002
From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu)
Date: May 12, 2002 10:31:39 PM
Subject: Problem tylanpoly 2002-05-12 22:31:38: tube not moving smoothly
Message-ID: <mailman.106.1356283789.5060.tylanpoly-pcs@snf.stanford.edu>

I'm not sure if this is a problem or not, but as I was unloading my wafers, I noticed that the tube was not coming out smoothly.  It would move haltingly, pause a few seconds, then continue.  The same happened as I sent the tube back into the furnace.  Usually it seems that the tube moves back and forth very smoothly, so I thought I would report this in case it is a problem.