Shutdown tylanpoly 2002-05-02 12:32:25: Base pressure too high (1515)

mdickey at snf.stanford.edu mdickey at snf.stanford.edu
Thu May 2 01:51:01 PDT 2002


End baffle came off, put it back on and vacuumed up broken
wafer pieces. Leak checked and adjusted cantilever. Ready
for use




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