From rcrane at snf.stanford.edu  Fri Oct  4 04:19:32 2002
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Oct 4, 2002 4:19:32 PM
Subject: Problem tylanpoly 2002-10-04 16:19:31: Low SiH4 level see e-mail to users
Message-ID: <mailman.140.1356283790.5060.tylanpoly-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Mon Oct  7 06:51:07 2002
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Oct 7, 2002 6:51:07 AM
Subject: Shutdown tylanpoly 2002-10-07 06:51:06: Bottle change
Message-ID: <mailman.141.1356283790.5060.tylanpoly-pcs@snf.stanford.edu>

System is down for Silane bottle change



From seymour at snf.stanford.edu  Tue Oct  8 07:19:17 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Oct 8, 2002 7:19:17 AM
Subject: Shutdown tylanpoly 2002-10-07 06:51:06: Bottle change
Message-ID: <mailman.142.1356283790.5060.tylanpoly-pcs@snf.stanford.edu>

cylinder changed leak, check passed



From seymour at snf.stanford.edu  Tue Oct  8 07:19:30 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Oct 8, 2002 7:19:30 AM
Subject: Problem tylanpoly 2002-10-04 16:19:31: Low SiH4 level see e-mail to users
Message-ID: <mailman.143.1356283790.5060.tylanpoly-pcs@snf.stanford.edu>

cylinder changed



From mcconnel at snf.stanford.edu  Wed Oct  9 03:36:23 2002
From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu)
Date: Oct 9, 2002 3:36:23 PM
Subject: Problem tylanpoly 2002-10-09 15:36:22: trouble closing tube door
Message-ID: <mailman.144.1356283790.5060.tylanpoly-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Thu Oct 10 07:28:48 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Oct 10, 2002 7:28:48 AM
Subject: Problem tylanpoly 2002-10-09 15:36:22: trouble closing tube door
Message-ID: <mailman.145.1356283790.5060.tylanpoly-pcs@snf.stanford.edu>

tightened loader drive cable. door closed as it should.running polyemit recipe. tube is up



From seymour at snf.stanford.edu  Fri Oct 25 08:25:09 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Oct 25, 2002 8:25:09 AM
Subject: Shutdown tylanpoly 2002-10-25 08:25:08: burnbox needs cleaning
Message-ID: <mailman.146.1356283790.5060.tylanpoly-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Oct 25 09:28:42 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Oct 25, 2002 9:28:42 AM
Subject: Shutdown tylanpoly 2002-10-25 08:25:08: burnbox needs cleaning
Message-ID: <mailman.147.1356283790.5060.tylanpoly-pcs@snf.stanford.edu>

burnbox cleaned