Shutdown tylanpoly 2003-01-16 06:47:35: SiH4 cylinder change

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Jan 17 01:47:04 PST 2003


Film layer looks clean and clear.
Unifomity tests- POLYEMIT, 01:05:00
Wf pos Cen  Top     Bot     Lf        Rt
Front   8493  8079  8156  8348  8357 
Cen    8923  8928  9035  8983  8923
Back 10265 10219 9625 9877  9905




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