From yyao at snf.stanford.edu Mon Jun 2 12:03:50 2003 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jun 2, 2003 12:03:50 PM Subject: Problem tylanpoly 2003-06-02 12:03:49: Report Problem for tylanpoly Message-ID: MFS alarm at polypump recipe From rcrane at snf.stanford.edu Mon Jun 2 02:43:52 2003 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Jun 2, 2003 2:43:52 PM Subject: Shutdown tylanpoly 2003-06-02 14:43:51: Report Shutdown for tylanpoly Message-ID: MFC460 controller is intermittant From rcrane at snf.stanford.edu Mon Jun 2 03:58:08 2003 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Jun 2, 2003 3:58:08 PM Subject: Problem tylanpoly 2003-06-02 12:03:49: Report Clear for tylanpoly Message-ID: problem upgraded to shutdown From kailash at snf.stanford.edu Tue Jun 3 10:28:44 2003 From: kailash at snf.stanford.edu (kailash at snf.stanford.edu) Date: Jun 3, 2003 10:28:44 PM Subject: Shutdown tylanpoly 2003-06-03 22:28:44: Report Shutdown for tylanpoly Message-ID: N2purge did not turn on in step 110 of polyemit (or even polypump). Seems to be an MFS alarm. Eric helped me put in manual MFS so that N2bckfl was set on (running polypump manually). From seymour at snf.stanford.edu Wed Jun 4 02:55:22 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 4, 2003 2:55:22 PM Subject: Shutdown tylanpoly 2003-06-03 22:28:44: Report Clear for tylanpoly Message-ID: replaced faulty I/O board in the MFS460 controller. Checked all gas flows and ran pump recipe, and operation is ok . From hansen at snf.stanford.edu Thu Jun 5 06:06:39 2003 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Jun 5, 2003 6:06:39 PM Subject: Comment tylanpoly 2003-06-05 18:06:39: pressure high, MFS error #8 Message-ID: FYI: I had MFS error 08 during deposition on polyemit program. I'm not sure what this means, but the process pressure also higher than usual at the end of the deposition: 482. However, film seems normal and was close to the expected thickness. From hermosillo at snf.stanford.edu Fri Jun 6 01:33:52 2003 From: hermosillo at snf.stanford.edu (hermosillo at snf.stanford.edu) Date: Jun 6, 2003 1:33:52 AM Subject: Problem tylanpoly 2003-06-06 01:33:51: Report Problem for tylanpoly Message-ID: MFS Alarm - During AMOR585 run. Nitrogen BKFL of 1.2 during process run-process pressure stayed at 460 instead of 400. From lindaw at snf.stanford.edu Fri Jun 6 09:34:50 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jun 6, 2003 9:34:50 AM Subject: Problem tylanpoly 2003-06-06 09:34:50: MFS alarm at beginning of deposition Message-ID: while monitoring the process pressure during the transition from step 65 to step 70 of AMOR585, I noticed that when the new step started, that the pressure showed a reading of 880, then something like 940 before the MFS alarm went off. Notified maintenance, and then rechecked the pressure, it had gon back down to 453.7. It is supposed to be 400 during this process. From tberg at snf.stanford.edu Fri Jun 6 01:04:23 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Jun 6, 2003 1:04:23 PM Subject: Shutdown tylanpoly 2003-06-06 13:04:22: Report Shutdown for tylanpoly Message-ID: Pressure is too high changing pump From seymour at snf.stanford.edu Fri Jun 6 02:28:32 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 6, 2003 2:28:32 PM Subject: Shutdown tylanpoly 2003-06-06 13:04:22: Report Clear for tylanpoly Message-ID: installed a rebuilt pump. From seymour at snf.stanford.edu Fri Jun 6 02:27:37 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 6, 2003 2:27:37 PM Subject: Problem tylanpoly 2003-06-06 09:34:50: Report Clear for tylanpoly Message-ID: process pressure too high changing pump From seymour at snf.stanford.edu Fri Jun 6 02:26:55 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 6, 2003 2:26:55 PM Subject: Problem tylanpoly 2003-06-06 01:33:51: Report Clear for tylanpoly Message-ID: process pressure problems pump being checked out From seymour at snf.stanford.edu Fri Jun 6 02:31:17 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 6, 2003 2:31:17 PM Subject: Problem tylanpoly 2003-06-06 14:31:16: Report Problem for tylanpoly Message-ID: changed vacuum pump and checked base pressure and leak rate. both were ok. Process pressure is lower then before pump change. From hansen at snf.stanford.edu Sat Jun 7 01:46:33 2003 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Jun 7, 2003 1:46:33 AM Subject: Comment tylanpoly 2003-06-07 01:46:32: Report Comment for tylanpoly Message-ID: Did not pass leak check first try, but very close as it hit 61.0 in the last few seconds and aborted. After cleaning the door seal, I tried again, and it passed the leak check and ran normally. Still the leak pressure is pretty high, though, at 54.2. From seymour at snf.stanford.edu Mon Jun 9 03:32:02 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jun 9, 2003 3:32:02 PM Subject: Problem tylanpoly 2003-06-06 14:31:16: Report Clear for tylanpoly Message-ID: resolved process pressure problems with MFS460 controller. The pressure was good but the readour was almost 2x. Did leak check and it was good. Flowed gasses as per amor585 recipe and process pressure was 205 mt. From mdickey at snf.stanford.edu Mon Jun 23 06:01:29 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Jun 23, 2003 6:01:29 AM Subject: Shutdown tylanpoly 2003-06-23 06:01:28: Report Shutdown for tylanpoly Message-ID: Down for pull and clean From mdickey at snf.stanford.edu Mon Jun 23 12:56:36 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Jun 23, 2003 12:56:36 PM Subject: Comment tylanpoly 2003-06-23 12:56:35: Report Comment for tylanpoly Message-ID: Pull and clean is done. Currently running AMOR550. From gladys at snf.stanford.edu Tue Jun 24 03:16:16 2003 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Jun 24, 2003 3:16:16 PM Subject: Shutdown tylanpoly 2003-06-23 06:01:28: Report Clear for tylanpoly Message-ID: testrun completed, ok to use