Comment tylanpoly 2003-06-05 18:06:39: pressure high, MFS error #8

hansen at hansen at
Thu Jun 5 06:06:39 PDT 2003

FYI: I had MFS error 08 during deposition on polyemit program.  I'm not sure what this means, but the process pressure also higher than usual at the end of the deposition: 482.  However, film seems normal and was close to the expected thickness.

More information about the tylanpoly-pcs mailing list