Comment tylanpoly 2003-06-05 18:06:39: pressure high, MFS error #8

hansen at snf.stanford.edu hansen at snf.stanford.edu
Thu Jun 5 06:06:39 PDT 2003


FYI: I had MFS error 08 during deposition on polyemit program.  I'm not sure what this means, but the process pressure also higher than usual at the end of the deposition: 482.  However, film seems normal and was close to the expected thickness.




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