Problem tylanpoly 2003-06-06 09:34:50: MFS alarm at beginning of deposition

lindaw at lindaw at
Fri Jun 6 09:34:50 PDT 2003

while monitoring the process pressure during the transition from step 65 to step 70 of AMOR585, I noticed that when the new step started, that the pressure showed a reading of 880, then something like 940 before the MFS alarm went off.  Notified maintenance, and then rechecked the pressure, it had gon back down to 453.7.  It is supposed to be 400 during this process. 

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