Problem tylanpoly 2003-06-06 14:31:16: Report Problem for tylanpoly

seymour at snf.stanford.edu seymour at snf.stanford.edu
Fri Jun 6 02:31:17 PDT 2003

Previous message: Shutdown tylanpoly 2003-06-06 13:04:22: Report Clear for tylanpoly
Next message: Problem tylanpoly 2003-06-06 09:34:50: MFS alarm at beginning of deposition
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

changed vacuum pump and checked base pressure and leak rate. both were ok. Process pressure is lower then before pump change.

Previous message: Shutdown tylanpoly 2003-06-06 13:04:22: Report Clear for tylanpoly
Next message: Problem tylanpoly 2003-06-06 09:34:50: MFS alarm at beginning of deposition
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the tylanpoly-pcs mailing list