Problem tylanpoly 2003-06-06 14:31:16: Report Clear for tylanpoly

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Jun 9 03:32:02 PDT 2003

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resolved process pressure problems with MFS460 controller. The pressure was good but the readour was almost 2x. Did leak check and it was good. Flowed gasses as per amor585 recipe and process pressure was 205 mt.

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