From tberg at snf.stanford.edu Fri May 2 11:18:11 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: May 2, 2003 11:18:11 AM Subject: Comment tylanpoly 2003-05-02 11:18:10: Report Comment for tylanpoly Message-ID: Checked SiH4 flow. it was low purgeed sensor- flow is back to normal now. needs test. ted From seymour at snf.stanford.edu Thu May 8 08:14:02 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2003 8:14:02 AM Subject: Shutdown tylanpoly 2003-04-28 17:22:36: Report Clear for tylanpoly Message-ID: Checked Silane flow calibration. Its ok now. Needs a test From seymour at snf.stanford.edu Thu May 8 08:15:17 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2003 8:15:17 AM Subject: Shutdown tylanpoly 2003-05-08 08:15:13: Report Shutdown for tylanpoly Message-ID: Needs a test after flow checks. From seymour at snf.stanford.edu Thu May 8 08:16:15 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2003 8:16:15 AM Subject: Shutdown tylanpoly 2003-05-08 08:16:14: Report Shutdown for tylanpoly Message-ID: needs test after flow checks. From seymour at snf.stanford.edu Thu May 8 08:17:32 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2003 8:17:32 AM Subject: Shutdown tylanpoly 2003-05-08 08:15:13: Report Clear for tylanpoly Message-ID: entered message twice, removing one. From latta at snf.stanford.edu Thu May 8 12:57:41 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: May 8, 2003 12:57:41 PM Subject: Shutdown tylanpoly 2003-05-08 08:16:14: Report Clear for tylanpoly Message-ID: Yo Team! Last run came out great; edges are clean and thickness is back to 'normal'. Center= 1557A Top= 1552 Bottom= 1573 Left= 1565 Right= 1560 Mean= 1561. Green light! From hermosillo at snf.stanford.edu Fri May 23 05:15:23 2003 From: hermosillo at snf.stanford.edu (hermosillo at snf.stanford.edu) Date: May 23, 2003 5:15:23 PM Subject: Shutdown tylanpoly 2003-05-23 17:15:22: Report Shutdown for tylanpoly Message-ID: MFC PROBLEM From seymour at snf.stanford.edu Tue May 27 09:15:21 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 27, 2003 9:15:21 AM Subject: Shutdown tylanpoly 2003-05-23 17:15:22: Report Clear for tylanpoly Message-ID: system had MSF overtemp error. checked fan and it was ok.. Also had backfill N2 alarm. checked sensor and replaced compairator and sensor zero pot. ran auto zero routine and checked flows. put mfs460 in auto and started polypump. From jdas at snf.stanford.edu Tue May 27 10:21:04 2003 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: May 27, 2003 10:21:04 AM Subject: Shutdown tylanpoly 2003-05-27 10:21:04: Report Shutdown for tylanpoly Message-ID: No process gas flow From seymour at snf.stanford.edu Tue May 27 11:50:54 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 27, 2003 11:50:54 AM Subject: Shutdown tylanpoly 2003-05-27 10:21:04: Report Clear for tylanpoly Message-ID: recipe aborted due to high tube base pressure causing leak check to fail and jump to step 120 on amor585. Checked all system flows and base pressure and leak rate all good. Started AMOR585 again and it went thorugh leak check step ok and continued on through the recipe. From tberg at snf.stanford.edu Fri May 30 06:56:44 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: May 30, 2003 6:56:44 AM Subject: Shutdown tylanpoly 2003-05-30 06:56:43: Report Shutdown for tylanpoly Message-ID: liner in burn box cracked . down for replacement From tberg at snf.stanford.edu Fri May 30 08:20:24 2003 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: May 30, 2003 8:20:24 AM Subject: Shutdown tylanpoly 2003-05-30 06:56:43: Report Clear for tylanpoly Message-ID: burn box back up